Broadband dielectric spectroscopy of ALl/Lu2O3/Al thin film sandwiches.

• Autorzy: Wiktorczyk T.
• Konferencja: APTADM 2007, III International Conference on Advances in Processing Testing and Application of Dielectric Materials., September, 26-28, 2007 Wrocław, Poland
• Języki publikacji: EN

Abstrakty

EN

The paper focuses on the dielectric characterization of electron-beam deposited lutetium oxide thin films sandwiched between aluminium electrodes. The complex capacitance characteristics were measured in the frequency domain (from 10/xHz to 10MHz) with dielectric response analyser. The influence of the temperature, the insulator thickness and sample aging on C'(u>) and C"((D) characteristics was examined. It was shown that high-frequency/low-temperature dielectric data are assigned to the volume of lutetium oxide film, whereas the low-frequency/high-temperature results are connected with M/I interfaces. The width of near-electrode regions (Schottky barriers) was estimated (k = 2.6-4.7 nm).

Słowa kluczowe

EN

lutetium oxide; thin films; dielectric properties; MIM structures; rare earth oxides

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Prace Naukowe Instytutu Podstaw Elektrotechniki i Elektrotechnologii Politechniki Wrocławskiej. Konferencje
• Rocznik: 2007
• Tom: Vol. 46, nr 19
• Strony: 82--85
• Opis fizyczny: Bibliogr. 18 poz.

Twórcy

autor

Wiktorczyk T.

• Institute of Physics, Wroclaw University of Technology, 50-370 Wroclaw, Wybrzeze Wyspianskiego 27, POLAND

Bibliografia

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