Powiadomienia systemowe
- Sesja wygasła!
Tytuł artykułu
Autorzy
Wybrane pełne teksty z tego czasopisma
Identyfikatory
Warianty tytułu
Konferencja
8th International Conference on Intermolecular and Magnetic Interaction in Matter, Nałeczów 8-10 September 2005
Języki publikacji
Abstrakty
Liquid phase epitaxy (LPE) and, in particular, epitaxial lateral overgrowth (ELO) is an attractive method of thin film deposition, owing to the simplicity of its technology and a reduced growth temperature. In this paper, we present recent results of the ELO of silicon layers carried out by means of LPE using Ar as an ambient gas, without any addition of hydrogen, potentially explosive gas, which makes this deposition technique a very safe process. The aim of the this work focused on the silicon ELO growth on partially masked substrates was to determine optimal conditions of growth resulting in ELO layers of the maximum aspect ratio and minimum defect density. Data presented herein clearly show that the epitaxial layers characterized by the maximum value of the aspect ratio can be obtained by application of the 0.25°C/min cooling rate. Noteworthy is the fact that in the same conditions the defect density achieves the minimum value of 1.07×104 cm-2, which is the amount smaller by the factor of 10 than the defect density of Si substrates used (1.7×105 cm-2). It confirms the ELO technique as a promising tool for the fabrication of low-defect density silicon layers of good morphology.
Wydawca
Czasopismo
Rocznik
Tom
Strony
967--973
Opis fizyczny
Bibliogr. 7 poz.
Twórcy
autor
autor
- Institute of Physics, Lublin University of Technology, Nadbystrzycka 38, 20-618 Lublin, Poland, i.jozwik@pollub.pl
Bibliografia
- [1] ZYTKIEWICZ Z.R., Thin Solid Films, 412 (2002), 64.
- [2] SHI Z., YOUNG T.L., GREEN M.A., Mater. Lett., 12 (1991), 339.
- [3] SHI Z., ZHANG W., ZHENG G.F., KURIANSKI J., GREEN M.A., BERGMANN R., J. Cryst. Growth, 151 (1995), 278.
- [4] BERGMANN R., J. Cryst. Growth, 110 (1991), 823.
- [5] JÓŹWIK I., KRAIEM J., OLCHOWIK J.M., FAVE A., SZYMCZUK D., ZDYB A., Mol. Phys. Rep., 39 (2004), 91.
- [6] KRAIEM J., FAVE A., KAMINSKI A., LEMITI M., JÓŹWIK I., OLCHOWIK J.M., Proc. 19th European Photovoltaic Solar Energy Conference and Exhibition, Paris, France, 7–11 2004, 1 (2004), 1158.
- [7] SECCO D’ARAGONA F., J. Electrochem. Soc., 119 (1972), 948.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPW8-0003-0039