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Experimental challenges for approaching local strain determination in silicon by nano-Raman spectroscopy

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Raman intensity enhancement induced by nanoprobes (metal particles and metallised tips) approached to a strained silicon sample surface is reported. With silver nanoparticles deposited onto a silicon surface, high enhancements in the vicinity of particles were observed. Furthermore, metallised tips were scanned inside the spot of the laser used for Raman measurements. Both silver-coated and pure silver tips, mounted onto a tuning fork, indicated high Raman signal enhancement for optimised tip position within the laser spot. Atomic force microscopy was performed on a structured sample to investigate the stability of these tips. Focused ion beam was utilized to refine and to re-sharpen pure silver tips after the measurements. Complementary measurements were performed using pure tungsten tips. Due to the high hardness of W wires, a special pre-etching technique was applied in this case.
Wydawca
Rocznik
Strony
19--31
Opis fizyczny
Bibliogr.22 poz.
Twórcy
autor
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autor
  • AMD Saxony LLC & Co. KG, Materials Analysis Department, Wilschdorfer Landstrasse 101, D-01109 Dresden, Germany, michael.hecker@amd.com
Bibliografia
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Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPW8-0003-0003
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