Ellipsometric investigation of CdTe films

• Autorzy: Evmenova A. , Odarych V. , Vuichyk M.
• Języki publikacji: EN

Abstrakty

EN

Ellipsometric parameters of CdTe films prepared by "hot-wall" vacuum-epitaxy method on single crystal Si substrates were measured at the wavelength of 632.8 nm. Refractive index, extinction coefficient and thickness of the films were determined. Based on the Maxwell-Garnett approximation of inhomogeneous material containing inclusions of different components (cavities, oxides) the refractive indices and extinction coefficients of effective media were calculated. Optical parameters of the film were found to depend on its thickness, which could be explained by different volume concentration of the substance in the film depth.

Słowa kluczowe

EN

cadmium telluride thin films; film thickness; optical parameters

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2012
• Tom: Vol. 42, nr 3
• Strony: 667--675
• Opis fizyczny: Bibliogr. 16 poz., rys., tab.

Twórcy

autor

Evmenova A.

autor

Odarych V.

autor

Vuichyk M.

• V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, prospect Nauky, 03028 Kyiv, Ukraine

Bibliografia

• [1] THUTUPALLI G.K.M., TOMLIN S.G., The optical properties of thin films of cadmium and zinc selenides and tellurides, Journal of Physics D: Applied Physics 9(11), 1976, pp. 1639–1646.
• [2] MEHTA B.R., KUMAR S., SINGH K., CHOPRA K.L., Application of spectroscopic ellipsometry to study the effect of surface treatments on cadmium telluride films, Thin Solid Films 164, 1988, pp. 265–268.
• [3] LAAZIZ Y., BENNOUNA A., CHAHBOUN N., OUTZOURHIT A., AMEZIANE E.L., Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements, Thin Solid Films 372(1–2), 2000, pp. 149–155.
• [4] RUSU M., RUSU G.G., On the optical properties of evaporated CdTe thin films, Physics of Low Dimensional Structures, No. 3/4, 2002, pp. 105–115.
• [5] PAYLSON P.D., XAVIER MATHEW, Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils, Solar Energy Materials and Solar Cells 82(1–2), 2004, pp. 279–290. Ellipsometric investigation of CdTe films 675
• [6] PEIRIS F.C., WEBER Z.J., CHEN Y., BRILL G., Optical properties of CdSexTe1–x epitaxial films studied by spectroscopic ellipsometry, Journal of Electronic Materials 33(6), 2004, pp. 724–727.
• [7] ODARYCH V., SARSEMBAEVA A., SIZOV F.F., VUYCHIK M., Determination of parameters of cadmium telluride films on silicon by the methods of main angle and multiangular ellipsometry, Semiconductor Physics, Quantum Electronics and Optoelectronics 8(4), 2005, pp. 55–59.
• [8] KORNIENKO K.N., ODARYCH V.A., POPERENKO L.V., VUICHYK M.V., Determination of optical parameters of CdTe films by principal angle ellypsometry, Functional Materials 13(1), 2006, pp. 179–182.
• [9] SHAABANA E.R., AFIFY N., EL-TAHER A., Effect of film thickness on microstructure parameters and optical constants of CdTe thin films, Journal of Alloys and Compounds 482(1–2), 2009, pp. 400–404.
• [10] BILEVYCH YE.O., SOSHNIKOV A., DARCHUK L.O., APATSKAYA M., TSYBRII Z., VUYCHIK M., BOKA A.I., SIZOV F.F., BOELLING O., SULKIO-CLEFF B., Influence of the substrate materials on the properties of CdTe thin films obtained by the hot-wall epitaxy method, Journal of Crystal Growth 275(1–2), 2005,pp. e1177–e1181.
• [11] EVMENOVA A.Z., ODARYCH V.A., SIZOV F.F., VUICHYK M.V., Absorptive CdTe films optical parameters and film thickness determination by the ellipsometric method, Optica Applicata 38(3), 2008, pp. 585–600.
• [12] MAKARA V.A., ODARYCH V.A., KEPYCH T.U., PREOBRAJENSKAJA T.D., RUDENKO O.V., Tekhnologiya i konstruirovanie v elektronnoi apparature 3(81), 2009, pp. 40–46, (in Russian).
• [13] GAVRYLENKO V.I., GREKOV A.M., KORBUTJAK D.V., Opticheskie svoistva poluprovodnikov. Spravochnik, Naukova Dumka, Kiev, 1987, p. 607, (in Russian).
• [14] FLORY F., ESCOUBAS L., Optical properties of nanostructured thin films, Progress in Quantum Electronics 28(2), 2004, pp. 89–112.
• [15] SADAO ADACHI, TOSHIFUMI KIMURA, NORIHIRO SUZUKI, Optical properties of CdTe: Experiment and modeling, Journal of Applied Physics 74(5), 1993, pp. 3435–3442.
• [16] VEGER E.F, GONCHAREKO A.V., DMITRUK M.L., Optics of small particles and disperse media, Naukova Dumka, Kiev, 1999, p. 347, (in Ukranian).