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Research and fabrication of integrated optical chip of Mach-Zehnder microinterference accelerometer

Wybrane pełne teksty z tego czasopisma
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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
A novel hybrid-integrated optical accelerometer, based on Mach-Zehnder interference, is described. The integrated Mach-Zehnder microinterferometer chip is investigated theoretically and experimentally. On the LiNbO3 substrate with the dimensions of 38 mm×6 mm×2 mm, MMI optical power splitter, Y-branching guide, phase modulator and polarizers are integrated to constitute the Mach-Zehnder microinterference chip. The performance of a prototype of the accelerometer is characterised. The measured frequency spectrum is in good agreement with the theoretical prediction.
Czasopismo
Rocznik
Strony
121--128
Opis fizyczny
bibliogr. 12 poz.
Twórcy
autor
autor
autor
autor
autor
autor
  • Key Laboratory for Petroleum-gas Equipment of EMC, Southwest Petroleum University, Chengdu 610500, China
Bibliografia
  • [1] JAKSIC Z., RADULOVIC K., TANASKOVIC D., MEMS accelerometer with all-optical readout based on twin-defect photonic crystal waveguide, 24th International Conference on Microelectronics,May 16–19, 2004, Vol. 1, pp. 231–234.
  • [2] MÜLLER J., MEMS on silicon for integrated optic metrology and communication systems,Microsystem Technologies 9(5), 2003, pp. 308–315.
  • [3] KALENIK J., PAJĄK R., A cantilever optical-fiber accelerometer, Sensors and Actuators A 68(1–3), pp. 350–355.
  • [4] JIA NIAN CAO, YA BIN ZHANG, WEI XIN WANG, TAO HAI, Research and design of a large-phase shift-fringe-count interferometric fiber-optic accelerometer, Proceedings of SPIE 5634, 2004,pp. 315–322.
  • [5] KE TAO, ZHU TAO, RAO YUNJIANG, XU MIN, SHI CUIHUA, Accelerometer based on all-fiber Fabry–Perot interferometer formed by hollow-core photonic crystal fiber, Chinese Journal of Lasers 37(1), 2010, pp. 171–175.
  • [6] ZENG N., SHI C.Z., ZHANG M., WANG L.W., LIAO Y.B., LAI S.R., A 3-component fiber-optic accelerometer for well logging, Optics Communications 234(1–6), 2004, pp. 153–162.
  • [7] GORECKI C., Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining, Proceedings of SPIE 3825, 1999, pp. 47–52.
  • [8] LLOBERA A., PLAZA J.A., SALINAS I., BERGANZO J., GARCIA J., ESTEVE J., DOMINGUEZ C., Technological aspects on the fabrication of silicon-based optical accelerometer with ARROW structures,Sensors and Actuators A 110(1–3), 2004, pp. 395–400.
  • [9] TANG DONG-LIN, CHEN CAI-HE, CUI YU-MING, DING GUI-LAN, WANG JIN-HAI, XIE JIAN-ZHI,Spring system of three-component photoelastic fiber optic accelerometer, Journal of Tianjin University 38(1), 2005, pp. 61–64.
  • [10] HU H., RICKEN R., SOHLER W., Low-loss ridge waveguides on lithium niobate fabricated by local diffusion doping with titanium, Applied Physics B 98(4), 2010, pp. 677–679.
  • [11] HE JUN, XIAO HAO, FENG LEI, LI FANG, ZHANG SONGWEI, LIU YULIANG, Analysis of phasecharacteristics of fiber michelson interferometer based on a 3×3 coupler, Acta Optica Sinica 28(10),2008, pp. 1867–1873.
  • [12] MARCUSE D., Optimal electrode design for integrated optics modulators, IEEE Journal of Quantum Electronics 18(3), 1982, pp. 393–398.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPW7-0019-0091
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