Fabrication of a 2D thermally tunable reflective grating for measuring a CO2 laser beam profile

• Autorzy: Riahi M. , Latifi H.
• Języki publikacji: EN

Abstrakty

EN

In this article, application of a 2D thermally tunable reflective grating for measuring the beam profile of a CO2 laser is proposed. A 2D grating is first fabricated on a glass substrate by conventional lithography technique. The grooves of the grating are filled with nitrobenzene, the refractive index of which highly depends on temperature. A double side polished silicon wafer is then placed on the grating. If a CO2 laser is incoming from silicon side, a portion of it is transmitted and absorbed in the grating structure. Depending on the beam profile of the CO2 laser, a temperature profile is produced on the grating causing the same profile for efficiency of the grating for a visible light. The changes in the efficiency, cause changes in intensity of dif-fraction orders. By measuring the intensity of the first order of diffraction, the beam profile of the CO2 laser is imaged on a visible CCD camera.

Słowa kluczowe

EN

tunable grating; laser beam profiler

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2011
• Tom: Vol. 41, nr 3
• Strony: 735--742
• Opis fizyczny: Bibliogr. 9 poz.

Twórcy

autor

Riahi M.

autor

Latifi H.

• Laser and Plasma Research Institute, Shahid Beheshti University, Evin, Tehran, Iran

Bibliografia

• [1] CASTRACANE J., GUTIN M.A., GUTIN O.N., Micromechanically controlled diffraction: A new tool for spectroscopy, Proceedings of SPIE 3951, 2000, 36–45.
• [2] SENE D.E., GRANTHAM J.W., BRIGHT V.M., COMTOIS J.H., Development and characterization of micromechanical gratings for optical modulation, [In] Proceedings of the Ninth Annual International IEEE Micro Electro Mechanical Systems Workshop, 1996, pp. 222–227.
• [3] WONG C.W., JEON Y., BARBASTATHIS G., KIM S.-G., Analog tunable gratings driven by thin-film piezoelectric microelectromechanical actuators, Applied Optics 42(4), 2003, pp. 621–626.
• [4] CHEN J., BOS P.J., VITHANA H., JOHNSON D.L., An electrooptically controlled liquid crystal diffraction grating, Applied Physics Letters 67(18), 1995, pp. 2588–2590.
• [5] TRISNADI J.I., CARLISLE C.B., MONTEVERDE R., Overview and applications of grating-light--valve-based optical write engines for high-speed digital imaging, Proceedings of SPIE 5348,2004, pp. 52–64.
• [6] RIAHI M., LATIFI H., MOGHIMISLAM G., Fabrication of a thermally actuated tunable grating and its application as a CO2 laser beam profile analyzer, Applied Optics 47(28), 2008, pp. 5175–5181.
• [7] RIAHI M., LATIFI H., MADANI A., MOAZZENZADEH A., Design and fabrication of a spatial light modulator using thermally tunable grating and thin-film heater, Applied Optics 48(30), 2009, pp. 5647–5654.
• [8] WEBER M.J., Handbook of Optical Materials, CRC Press, 2003.
• [9] AI-QUN LIU, Photonic MEMS Devices Design, Fabrication and Control, MEMS Thermo-Optic Switches, CRC Press,Taylor and Francis Group, 2009, Chapter 3, pp. 89–129.