Low temperature co-fired ceramics (LTCC) microsystems

• Autorzy: Golonka L. , Bembnowicz P. , Jurkow D. , Malecha K. , Roguszczak R. , Tadaszak R.
• Języki publikacji: EN

Abstrakty

EN

The paper presents general information on ceramic microsystems. Low temperature co-fired ceramics (LTCC) technology is described in detail. Research and development on the LTCC sensors and microsystems carried out at Wrocław University of Technology (Poland) are presented. Microfluidic system, polymerase chain reaction (PCR) microreactor, acceleration sensor and sol-gel fiber optics for ceramic microsystems are described.

Słowa kluczowe

EN

low temperature co-fired ceramics (LTCC); microsystem; polymerase chain reaction (PCR); microreactor

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2011
• Tom: Vol. 41, nr 2
• Strony: 383--388
• Opis fizyczny: Bibliogr. 10 poz.

Twórcy

autor

Golonka L.

autor

Bembnowicz P.

autor

Jurkow D.

autor

Malecha K.

autor

Roguszczak R.

autor

Tadaszak R.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

Bibliografia

• [1] GOLONKA L.J., Technology and applications of low temperature cofired ceramic (LTCC) based sensors and microsystems, Bulletin of the Polish Academy of Sciences, Technical Sciences 54(2), 2006, pp. 221–231.
• [2] PETERSON K.A., KNUDSON R.T., GARCIA E.J., PATEL K.D., OKANDAN M., HO C.K., JAMES C.D., ROHDE S.B., ROHRER B.R., SMITH F., ZAWICKI L.R., WROBLEWSKI B.D., LTCC in microelectronics, microsystems, and sensors, Proceedings of 15th International Conference MIXDES 2008, June 19–21, 2008, Poznań, Poland, pp. 23–37.
• [3] OTTINO J.M., WIGGINS S., Introduction: Mixing in microfluidics, Philosophical Transactions of the Royal Society A 362(1818), 2004, pp. 923–935.
• [4] MALECHA K., GOLONKA L.J., BAŁDYGA J., JASIŃSKA M., SOBIESZUK P., Serpentine microfluidic mixer made in LTCC, Sensors and Actuators B: Chemical 143(1), 2009, pp. 400–413.
• [5] MALECHA K., PIJANOWSKA D.G., GOLONKA L.J., TORBICZ W., LTCC microreactor for urea determination in biological fluids, Sensors and Actuators B: Chemical 141(1), 2009, pp. 301–308.
• [6] YONGHAO ZHANG, OZDEMIR P., Microfluidic DNA amplification – A review, Analytica Chimica Acta 638(2), 2009, pp. 115–125.
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• [8] BEMBNOWICZ P., HERBUT P., MAŁODOBRA M., KARPIEWSKA A., GOLONKA L., JONKISZ A., DOBOSZ T., The integrated LTCC chip for DNA amplification, Proceedings of 34th International Microelectronics and Packaging IMAPS-CPMT Poland Conference, September 22–25, 2010,Wrocław, Poland.
• [9] ZAWADA T., KARSTEN H., LOU-MØLLER R., JURKÓW D., RINGGAARD E., GOLONKA L., LTCC electromechanical devices based on PZT thick film technology, Proceedings of International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), April, 2009, Denver, USA.
• [10] NOWAK K., TADASZAK R., RYZNAR T., WOŹNIAK Ł., ŁUKOWIAK A., GOLONKA L., PATELA S., Sol–gel-based optical waveguides on LTCC substrates, Proceedings of 31st International Spring Seminar on Electronics Technology ISSE, May, 2008, Budapest, Hungary, pp. 526–530.