Detektory elektronów w elektronowych mikroskopach skaningowych wysoko próżniowych

• Autorzy: Hejna J.

Warianty tytułu

EN

Electron detectors in high vacuum scanning electron microscopes

• Języki publikacji: PL

Abstrakty

PL

Omówiono detektory elektronów stosowane w elektronowych mikroskopach skaningowych w warunkach wysokiej próżni w komorze preparatowej. Przedstawiono detektory przeznaczone do otrzymywania kontrastu topograficznego i materiałowego. Główny nacisk położono na detektory elektronów rozproszonych wstecznie, przeznaczone do otrzymywania kontrastu topograficznego. Podano rozwiązania konstrukcyjne, analiz: działania, wyniki test6w eksperymentalnych oraz zastosowania detektorów. Przedyskutowano wpływ rodzaju zbieranych elektron6w (wtórych lub rozproszonych wstecznie), rodzaju elementu detekcyjnego (scyntylator, dioda półprzewodnikowa, powielacz elektronowy), usytuowania detektora w komorze mikroskopu, efektywności zbierania elektronów wyemitowanych z próbki oraz cech powierzchni próbki na sygnał detektora. Opisano metody stosowane podczas projektowania i optymalizacji detektorów, a mianowicie metod;: Monte Carlo do symulacji rozproszenia elektron6w w próbce i obliczania sygnałów detektorów oraz metody testów doświadczalnych. Przedstawiono wyniki obliczeń elektronooptycznych, wyniki obliczeń sygnałów oraz wyniki testów dla różnych próbek i różnych detektorów. Przedstawiono sposób obliczania oraz wyniki pomiar6w wsp6lczynnika szumów różnych detektorów. Głównym kierunkiem badan autora było opracowanie nowych detektorów kontrastu topograficznego wykorzystujących elektrony rozproszone wstecznie wyemitowane z próbki pod małymi kątami w stosunku do powierzchni. Wyniki testów pokazują, że nowe detektory zapewniają uzyskanie wysokiego poziomu kontrastu topograficznego w obrazach mikroskopowych, zarówno w zakresie elektronowej mikroskopii skaningowej standardowej (napięcie przyspieszające wyższe od 5 kV), jak i niskonapięciowej (napięcie przyspieszające niższe od 5 kV).

EN

Electron detectors used in scanning electron microscopes with high vacuum in the specimen chamber are described. Detectors used for obtaining topographic and material contrast are presented, electron detectors of backscattered electrons used for obtaining topographic contrast are emphasized. Construction solutions, functional analysis, results of experimental tests and applications of detectors are presented. A dependence of the detector signal on the type of collected electrons (secondary or backscattered electrons), on the type of a detection element (scintillator, semiconductor diode, electron multiplier), on position of the detector in a microscope chamber, on efficiency of collection of electrons emitted from the specimen surface and on specimen surface features is discussed. Methods used in a stage of design and optimization of the detector, i.e. Monte Carlo method of simulation of electron scattering in the specimen and computation of detector signals and methods of experimental tests are described. Results of electro-optical and signal computations and results of experimental tests for different specimens and different detectors are presented. A method of computation of detector noise coefficient and results of its measurements for different detectors is presented. The main direction of author's research was development of new topographic contrast detectors utilizing backscattered electrons emitted at low angles in respect to the specimen surface. Tests results show, that new detectors enable to obtain high level of topographic contrast in micrographs, in the range of standard scanning electron microscopy (accelerating voltage higher than 5 kV), as well as in the range of low voltage scanning electron microscopy (accelerating voltage lower than 5 kV).

Słowa kluczowe

PL

elektronowy mikroskop skaningowy; elektrony rozproszone wstecznie; elektrony wtórne; kontrast topograficzny; kontrast materiałowy; detektory elektronów; zastosowanie detektorów; testy detektorów

EN

scanning electron microscope; electrons scattered backward; secondary electrons; topographic contrast; contrast material; electron detectors; detector tests; use of detectors

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Prace Naukowe Instytutu Materiałoznawstwa i Mechaniki Technicznej Politechniki Wrocławskiej. Monografie
• Rocznik: 2010
• Tom: Vol. 66, nr 27
• Strony: 3--215
• Opis fizyczny: bibliogr. 243 poz.,

Twórcy

autor

Hejna J.

• Instytut Materiałoznawstwa i Mechaniki Technicznej Politechniki Wrocławskiej, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław

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