Electron paramagnetic resonance and scanning electron microscopy characterization of diamond films fabricated by HF CVD method

• Autorzy: Fabisiak K. , Szreiber M. , Uniszkiewicz C. , Runka T. , Kasprowicz D.
• Języki publikacji: EN

Abstrakty

EN

Defects in diamond films, produced by the hot filament chemical vapour deposition (HF CVD) of methanol and hydrogen mixture as function of gas composition, were investigated by electron paramagnetic resonance (EPR), scanning electron microscopy (SEM) and Raman spectroscopy measurements. We found an isotropic g-value (2.003š0.0002) independent of growth conditions. The peak-to-peak of EPR line width changes from 0.3 to 0.6 mT and the spin density increases from 2.3ź1017 to 3.2ź1018 spin/cm-3 with increasing concentration of methanol vapour. The EPR line in general shows double character and was found to be superposition of two components, a narrower Lorentzian and a broader Gaussian, suggesting the existence of two different types of defects in diamond layer. EPR measurements were supported by SEM observation.

Słowa kluczowe

EN

hot filament chemical vapour deposition (HF CVD); diamond; electron paramagnetic resonance (EPR); Raman spectroscopy

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2009
• Tom: Vol. 39, nr 4
• Strony: 833--837
• Opis fizyczny: bibliogr. 9 poz.,

Twórcy

autor

Fabisiak K.

autor

Szreiber M.

autor

Uniszkiewicz C.

autor

Runka T.

autor

Kasprowicz D.

• Institute of Physics, Kazimierz Wielki University, Weyssenhoffa Sq.11, 85-072 Bydgoszcz, Poland

Bibliografia

• [1] KALISH R., The search for donors in diamond, Diamond and Related Materials 10(9–10), 2001, pp. 1749–1755.
• [2] MIZUOCHI N., OGURA M., WATANABE H., ISOYA J., OKUSHI H., YAMASAKI S., EPR study of hydrogen--related defects in boron-doped p-type CVD homoepitaxial diamond films, Diamond and Related Materials 13(11–12), 2004, pp. 2096–2099.
• [3] PEI SANN SIEW, KIAN PING LOH, WEI CHOONG POH, HENG ZHANG, Biosensing properties of nanocrystalline diamond film grown on polycrystalline diamond electrodes, Diamond and Related Materials 14(3–7), 2005, 426–431.
• [4] LOUBSER J.H.N., VAN WYK J.A., Electron spin resonance in the study of diamond, Reports on Progress in Physics 41(8), 1978, pp. 1201–1248.
• [5] MARQUARDT D.W., An algorithm for least-squares estimation of nonlinear parameters, Journal of the Society for Industrial and Applied Mathematics 11(2), 1963, pp. 431–441.
• [6] DUOSHENG LI, DUNWEN ZUO, WENZHUANG LU, RONGFA CHEN, BINGKUN XIANG, MIN WANG, Effects of methane concentration on diamond spherical shell films prepared by DC-plasma jet CVD, Solid State Ionic 179(21–26), 2008, pp. 1263–1267.
• [7] ORZESZKO S., BAŁA W., FABISIAK K., ROZPŁOCH F., DC conductivity and ESR of hydrogenated amorphous carbon films, Physica Status Solidi (a) 81(2), 1984, pp. 579–584.
• [8] VIANA G.A., LACERDA R.G., FREIRE F.L., MARQUES F.C., ESR investigation of graphite-like amorphous carbon films revealing itinerant states as the ones responsible for the signal, Journal of Non-Crystalline Solids 354(19–25), 2008, pp. 2135–2137.
• [9] STESMANS A., NOUWEN B., IAKOUBOVSKII K., Electron spin resonance characterization of a divacancy-related centre in CVD diamond, Journal of Physics: Condensed Matter 12(35), 2000, pp. 7807–7818.