Study of structural and optical properties of TiO2:Tb thin films prepared by high energy reactive magnetron sputtering method

• Autorzy: Domaradzki J. , Kaczmarek D. , Prociow E. L. , Wojcieszak D. , Sieradzka K. , Mazur M. , Lapinski M.
• Języki publikacji: EN

Abstrakty

EN

This work is focused on structural and optical properties of TiO2 thin films doped with different amount of terbium. The thin films have been prepared by high energy reactive magnetron sputtering (HE RMS) and by low pressure hot target reactive magnetron sputtering (LP HTRS) processes. Thin films were deposited from mosaic, metallic Ti-Tb target sputtered under oxygen plasma (without argon) at a pressure below 10-1 Pa. Structural examinations show nanocrystalline nature of prepared thin films with either anatase or rutile phases depending on concentration of Tb 0.4 at.% and 2.6 at.%, respectively. The phase transformation from the anatase to the rutile has not been observed after additional post-deposition annealing even at the temperature up to 1000 K. Based on investigations performed with the help of atomic force microscope high nanocrystalline, close-packed structure has been found. Studies of refraction index revealed higher value for the thin films prepared by the HE RMS than by the LP HTRS methods.

Słowa kluczowe

EN

TiO2; structural properties; Tb; optical properties

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2009
• Tom: Vol. 39, nr 4
• Strony: 815--823
• Opis fizyczny: bibliogr. 25 poz.,

Twórcy

autor

Domaradzki J.

autor

Kaczmarek D.

autor

Prociow E. L.

autor

Wojcieszak D.

autor

Sieradzka K.

autor

Mazur M.

autor

Lapinski M.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Bibliografia

• [1] OKIMURA K., Low temperature growth of rutile TiO2 films in modified rf magnetron sputtering, Surface and Coatings Technology 135(2–3), 2001, pp. 286–290.
• [2] BAOSHUN LIU, XIUJIAN ZHAO, QINGNAN ZHAO, CHUNLING LI, XIN HE, The effect of O2 partial pressure on the structure and photocatalytic property of TiO2 films prepared by sputtering, Materials Chemistry and Physics 90(1), 2005, pp. 207–212.
• [3] MITU B., VIZIREANU S., BIRJEGA R., DINESCU M., SOMACESCU S., OSICEANU P., PÂRVULESCU V., DINESCU G., Comparative properties of ternary oxides of ZrO2–TiO2–Y2O3 obtained by laser ablation, magnetron sputtering and sol–gel techniques, Thin Solid Films 515(16), 2007, pp. 6484–6488.
• [4] WON D.-J., WANG C.-H., JANG H.-K., CHOI D.-J., Effects of thermally induced anatase-to-rutile phase transition in MOCVD-grown TiO2 films on structural and optical properties, Applied Physics A 73(5), 2001, pp. 595–600.
• [5] KACZMAREK D., PROCIOW E., DOMARADZKI J., BORKOWSKA A., MIELCAREK W., WOJCIESZAK D., Influence of substrate type and its placement on structural properties of TiO2 thin films prepared by high energy reactive magnetron sputtering method, Materials Science-Poland 26(1), 2008, pp. 113–117.
• [6] DOMARADZKI J., KACZMAREK D., PROCIOW E.L., BORKOWSKA A., SCHMEISSER D., BEUCKERT G., Microstructure and optical properties of TiO2 thin films prepared by low pressure hot target reactive magnetron sputtering, Thin Solid Films 513(1–2), 2006, pp. 269–274.
• [7] THORNTON J.A., Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings, Journal of Vacuum Science and Technology 11(4), 1974, pp. 666–670.
• [8] GUENTHER K.H., Revisiting structure-zone models for thin-film growth, Proceedings of SPIE 1324, 1990, pp. 2–12.
• [9] LI G., CHEN L., GRAHAM M.E., GRAY K.A., A comparison of mixed phase titania photocatalysts prepared by physical and chemical methods: The importance of the solid–solid interface, Journal of Molecular Catalysis A: Chemical 275(1–2), 2007, pp. 30–35.
• [10] ESINGER W., On the mechanism of crystal growth orientation of ion beam assisted deposited thin films, Nuclear Instruments and Methods in Physics Research B 106(1–4), 1995, pp. 142–146.
• [11] MACAK K., KOUZNETSOV V., SCHNEIDER J., HELMERSSON U., PETROV I., Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge, Journal of Vacuum Science and Technology A 18(4), 2000, pp. 1533–1537.
• [12] PROCIÓW E., DOMARADZKI J., KACZMAREK D., BERLICKI T., Polish patent, 2007, No. P382 163.
• [13] PROCIÓW E., DOMARADZKI J., KACZMAREK D., BERLICKI T., Polish patent, 2006, No. P 379 365.
• [14] Film Star software, FTG Software Associates, Princeton, NJ, 08542 USA. Study of structural and optical properties ... 823
• [15] DOMARADZKI J., KACZMAREK D., BORKOWSKA A., SCHMEISSER D., MUELLER S., WASIELEWSKI R., CISZEWSKI A., WOJCIESZAK D., Influence of annealing on the structure and stoichiometry of europium doped titanium dioxide thin films, Vacuum 82(10), 2008, pp. 1007–1012.
• [16] Powder Diffraction File, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, PA, 1967, Card 21-1272 – PDF.
• [17] Powder Diffraction File, Joint Committee on Powder Diffraction Standards, ASTM, Philadelphia, PA, 1967, Card 21-1276 – PDF.
• [18] DIEBOLD U., The surface science of titanium dioxide, Surface Science Reports 48(5–8), 2003, pp. 53–229.
• [19] KACZMAREK D., DOMARADZKI J., WOJCIESZAK D., WASILEWSKI R., BORKOWSKA A., PROCIÓW E.L, CISZEWSKI A., Structural investigations of TiO2:Tb thin films by X-ray diffraction and atomic force microscopy, Applied Surface Science 254(14), 2008, pp. 4303–4307.
• [20] ZENG Q.G., DING Z.J., ZHANG Z.M., Synthesis, structure and optical properties of Eu3+/TiO2 nanocrystals at room temperature, Journal of Luminescence 118(2), 2006, pp. 301–307.
• [21] SETIAWATI E., KAWANO K., Stabilization of anatase phase in the rare earth; Eu and Sm ion doped nanoparticle TiO2, Journal of Alloys and Compounds 451(1–2), 2008, pp. 293–296.
• [22] SAIF M., ABDEL-MOTTALEB M.S.A., Titanium dioxide nanomaterial doped with trivalent lanthanide ions of Tb, Eu and Sm: Preparation, characterization and potential applications, Inorganica Chimica Acta 360(9), 2007, pp. 2863–2874.
• [23] MANE R.S., JOO O.-S., MIN S.-K., LOKHANDE C.D., HAN S.-H., A simple and low temperature process for super-hydrophilic rutile TiO2 thin films growth, Applied Surface Science 253(2), 2006, pp. 581–585.
• [24] CHEN T.L., FURUBAYASHI Y., HIROSE Y., HITOSUGI T., SHIMADA T., HASEGAWA T., Anatase phase stability and doping concentration dependent refractivity in codoped transparent conducting TiO2 films, Journal of Physics D: Applied Physics 40(19), 2007, pp. 5961–5964.
• [25] JUNG C.-K., LEE S.B. BOO J.-H., KU S.-J., YU K.-S., LEE J.-W., Characterization of growth behavior and structural properties of TiO2 thin films grown on Si(1 0 0) and Si(1 1 1) substrates, Surface and Coatings Technology 174–175, 2003, pp. 296–302.