Application of nanoscratching in electronic devices

• Autorzy: Ramiączek-Krasowska M. , Szyszka A. , Prażmowska J. , Paszkiewicz R. , Tłaczała M.
• Języki publikacji: EN

Abstrakty

EN

The lithography is a basic operation in the fabrication process of semiconductor devices. The scaling ability is the reason why the atomic force microscopy (AFM) nanolithograpy is currently studied in many laboratories. In the paper, the results of the mechanical AFM lithography, named nanoscribing or nanoscratching, are presented. In this method, the pattern is created by mechanical interaction between the AFM tip and a sample. This interaction requires the application of large forces in micronewtons scale.

Słowa kluczowe

EN

nanolithography; nanoscratching; AFM lithography

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2009
• Tom: Vol. 39, nr 4
• Strony: 711--716
• Opis fizyczny: bibliogr. 7 poz.,

Twórcy

autor

Ramiączek-Krasowska M.

autor

Szyszka A.

autor

Prażmowska J.

autor

Paszkiewicz R.

autor

Tłaczała M.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland

Bibliografia

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• [2] YAN Y.D., SUN T., DONG S., Study on effects of tip geometry on AFM nanoscratching tests, Wear 262(3–4), 2007, pp. 477–483.
• [3] YU-JU CHEN, JU-HUNG HSU, HEH-NAN LIN, Fabrication of metal nanowires by atomic force microscopy nanoscratching and lift-off process, Nanotechnology 16(8), 2005, pp. 1112–1115.
• [4] HU S., HAMIDI A., ALTMEYER S., KÖSTER T., SPANGENBERG B., KURZ H., Fabrication of silicon and metal nanowires and dots using mechanical atomic force lithography, Journal of Vacuum Science and Technology B 16(5), 1998, pp. 2822–2824.
• [5] DUBOIS E., BUBBENDORFF J.-L., Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy, Solid-State Electronics 43(6), 1999, pp. 1085–1089.
• [6] MAGNO R., BENNETT B.R., Nanostructure patterns written in III-V semiconductors by an atomic force microscope, Applied Physics Letters 70(14), 1997, pp. 1855–1857.
• [7] http://www.veecoprobes.com/p-3388-rtesp.aspx.