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Optical and electrical properties of TiO2 doped with Tb and Pd

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Optical and electrical properties of TiO2 doped with 0.6 at. % Tb and 9 at. % Pd have been investigated. Thin films were deposited by low pressure hot target reactive sputtering from a metallic Ti-Tb-Pd mosaic target on silicon and glass substrates. Total concentration of Tb and Pd was determined using an energy disperse spectrometer. Optical properties were studied by means of optical transmission. It has been shown that Tb dopant does not make any significant changes in the transmission level. Pd dopant shifts the fundamental absorption edge of TiO2 towards longer wavelengths and decreases the transmission to about 40%. For electrical characterization of the prepared thin films, temperature dependent resistivity and current-voltage (I-V) characteristics have been examined. It has been shown that incorporation of Pd and Tb into TiO2 matrix modifies its properties allowing one to obtain p-type oxide-semiconductor electrically and optically active at room temperature. Additionally, based on I-V measurements, the formation of heterojunction at the interface of thin film-silicon was confirmed.
Wydawca
Rocznik
Strony
143--147
Opis fizyczny
Bibliogr. 7 poz.
Twórcy
autor
autor
autor
autor
  • Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wrocław, Poland
Bibliografia
  • [1] TONOOKA K., BANDO H., AIURA Y., Thin Solid Films, 445 (2003), 327.
  • [2] CARCIA P.F., MCLEAN R.S., Transparent Oxide Semiconductor Thin Films Transistors, PCT U.S. Patent WO 2004/034449 A2, April 22, 2004.
  • [3] DOMARADZKI J., J. Non-Cryst. Solids, 352 (2006), 2328.
  • [4] DOMARADZKI J., BORKOWSKA A., KACZMAREK D., PROCIOW E., J. Non-Cryst. Solids, 352 (2006), 2324.
  • [5] DOMARADZKI J., Thin Solid Films, 497 (2006), 243.
  • [6] JIA Ch., XIE E., PENG A., JIANG R., YE F., LIN H., XU T., Thin Solid Films, 496 (2006), 555.
  • [7] MOON B.K., JEONG J.H., YI S.-S., KIM S.C., CHOI H., KIM J.H., Optical Materials, 28 (2006), 676.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPW7-0007-0177
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