The method of integration of silicon - micromachined sensors and actuators to microreactor made of Foturan(R) glass

• Autorzy: Knapkiewicz P. , Walczak R. , Dziuban J. A.
• Języki publikacji: EN

Abstrakty

EN

In this article results of unique low temperature anodic bonding silicon and FoturanŽ glass are presented. The new method of anodic bonding can be useful in designing and fabrication of intelligent microreactors equipped with microsensors and other microdevices suitable both to control and to steer chemical process. Direct assembling onto microreactors allows to think about integrated microreactors equipped with set of sensors, i.e., pressure sensors and other devices, i.e., valves, flow meters, etc. The demand for integration microreactor with measuring /steering setup, following the technology of low temperature anodic bonding and application of this technique are described.

Słowa kluczowe

EN

microreaction technology; sensors integration; low temperature anodic bonding; FoturanŽ glass and silicon anodic bonding

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2007
• Tom: Vol. 37, nr 1-2
• Strony: 65--72
• Opis fizyczny: Bibliogr. 8 poz.,

Twórcy

autor

Knapkiewicz P.

autor

Walczak R.

autor

Dziuban J. A.

• Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroclaw Poland

Bibliografia

• [1] New Eco-ejficent Industrial Process Using Microstmctured Unit Components — Safe and Environmental Friendly Production of Sensitive Compounds Ensured by Process Intensification, NEPUMUC PF6.
• [2] Dietrich T.R., Freitag A., Scholz R., Production and characteristics of microreactors made from glass, Chemical Engineering and Technology 28(4), 2005, pp. 477-83.
• [3] Roberge D.R., Ducry L., Bieler N., Cretton P., Zimmermannn B., Microreaction technology: A revolution for the fine chemical and pharmaceutical industries?, Chemical Engineering and Technology 28(3), 2005, pp. 318-23.
• [4] Watts P., Haswell S.J., The application of microreactors for small scale organic synthesis. Chemical Engineering and Technology 28(3), 2005, pp. 290-301.
• [5] Dziuban J.A., Bonding in Microsystem Technology, Springer Series in Advanced Microelectronics, Vol. 24, 2006.
• [6] Knapkiewicz P., Walczak R., Dziuban J.A., On integration of silicon/glass micromachinedsensors to microfluidical devices - toward intelligent microreactor, Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors 2006, Geteborg, Sweden, 17-20 September, 2006.
• [7] Briand D., Weber P., De Rooij N.F., Bonding properties of metals anodically bonded to glass, Sensors and Actuators A: Physical 114(2-3), 2004, pp. 543-9.
• [8] Knapkiewicz P., Walczak R., Dziuban J.A., Dietrich T.R., Integracja krzemowych i krzemowo-szklanych struktur czujników do szklą Foturan®, IX Konferencja Naukowa Czujniki Optoelektroniczne i Elektroniczne, COE 2006, Kraków - Zakopane, Poland, 19-22 June, 2006 (in Polish).