Wavelet shrinkage-based noise reduction from the high resolution X-ray images of epitaxial layers

• Autorzy: Kozłowski J. , Serafińczuk J. , Kozik A.
• Języki publikacji: EN

Abstrakty

EN

This paper presents advantages of employing the wavelet method in X-ray high-resolution image analysis of nanostructures. It is shown that many more details of the structure examined can be distin-guished in rocking curves (RC) as well as in reciprocal space maps (RSM) after application of the numerical procedure. The method proposed seems to be particularly suitable for imperfect epitaxial layers having significant lattice mismatch with respect to substrate. By means of the wavelet analysis of the X-ray images using de-noising procedure details invisible in raw pictures can be detected such as thickness fringes, gradient of lattice parameters etc., and duration of measurements can be shortened.

Słowa kluczowe

EN

wavelet; X-ray; epitaxial layer

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Materials Science
• Rocznik: 2003
• Tom: Vol. 21, No. 3
• Strony: 345--356
• Opis fizyczny: Bibliogr. 8 poz.

Twórcy

autor

Kozłowski J.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wroclaw, Poland

autor

Serafińczuk J.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wroclaw, Poland

autor

Kozik A.

• Institute of Engineering Cybernetics, Wroclaw University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wroclaw, Poland

Bibliografia

• [1] DAUBECHIES I., Commun. Pure Appl. Math., 41 (1988), 909.
• [2] MALLAT S., IEEE Trans. Pattern Anal. Machine Intel., 11 (1989), 674.
• [3] DONOHO D., JOHNSTONE I., Biometrica, 91 (1994), 429.
• [4] DAUBECHIES I., Ten Lectures on Wavelets, SIAM, Philadelphia, 1992.
• [5] NASON G., Choice of the threshold parameter in wavelet function estimation, [in:] A. Antoniadis and G. Oppenheim (Eds.), Wavelets and statistics, Lecture Notes in Statistics 103, Springer, New York, 1995, p. 261.
• [6] MISITI M., MISITI Y., OPPENHEIM G., POGGI J.M., Wavelet Toolbox User’s Guide, The MathWorks Inc., Natick, 1996.
• [7] PADUANO Q., WEYBURNE D., Jpn. J. Appl. Phys., 42 (2003), 1.
• [8] FEWSTER P.F., Semicond. Sci. Technol., 8 (1993), 1915.