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On the basis of n-type single-crystal (100) silicon substrate, a silicon p-n junction photodetector has been successfully developed. Three methods to improve photoresponse signal-to-noise ratio (SNR) were profoundly studied: the p-n junction depth was optimized to enhance the spectral responsivity within the wavelength range of 500-600 nm, an antireflection layer with the appropriate thickness was added to reduce the reflected light and enhance the sensitivity, the adjustment technique of spectral band response was adopted to remove the noise signal with normal silicon absorptive wavelengths. Eventually, the spectral responsivity SNR can be over 104 at 500-600 nm while the peak of spectral responsivity is 0.48 A/W at about 520 nm. After being optimized, silicon p-n junction photodetectors, which possess the properties of lower dark current, higher sensitivity, shorter response time and larger SNR, can be achieved.
Czasopismo
Rocznik
Tom
Strony
421--428
Opis fizyczny
Bibliogr. 6 poz.,
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autor
autor
autor
autor
autor
- Tianjin University, Tianjin, China 300072
Bibliografia
- [1] LU CHUNSHEN, Optoelectronic Technology and Application, Mechanical Industry Publishing House, Beijing 1992.
- [2] LIU ENKE, et al., Semiconductor Physics, Electronic Industry Publishing House, Beijing 2003.
- [3] SZE S.M., Physiscs of Semiconductor Devices, Electronic Industry Publishing House, Beijing 1987.
- [4] YIN CHANGSONG, ZHU XIAOGANG, Improvement of ultraviolet responsivity for silicon photodetector, Chinese Journal of Semiconductors 18(7), 1997, pp. 523–6.
- [5] LIU L.-N., CHEN C., LIU C.-H., Numerical simulation of spectral response for 650 nm silicon photodetector, Semiconductor Photonics and Technology 9(2), 2003, p. 82.
- [6] ZHANG SHENGCAI, ZHENG YUNGUANG et al., The analysis for reliability and life of the photo-sensitive diodes, Journal of Optoelectronics Laser 14(5), 2003, pp. 466–8.
Typ dokumentu
Bibliografia
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bwmeta1.element.baztech-article-BPW7-0002-0084