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Abstrakty
The diamond films were grown at different working gas pressure in the range of 20-80 mbar by using hot filament chemical vapor deposition (HF CVD) technique. It was observed that the film morphology was dependent on deposition pressure and changed from so called "ball-like" via (111) and (100) type to the morphology of mixed character. The diamond film quality was studied by means of Raman and ESR (electron spin resonance) spectroscopy measurements. Within the presented work a simplified model for heat conductivity was proposed which allows to estimate the value of the thermal conductivity on the basis of Raman and ESR measurements. The obtained results are in good agreement with those reported in literature.
Czasopismo
Rocznik
Tom
Strony
225--234
Opis fizyczny
Bibliogr., 21 poz.,
Twórcy
autor
autor
autor
autor
- Kazimierz Wielki University. Pl. Weyssenhoffa 11, 85-072 Bydgoszcz, Poland
Bibliografia
- [1] EBERT W., VESCAN A., BORST T.H., KOHN E., High current p/p+-diamond Schottky diode, IEEE Electron Device Letters 15(8), 1994, pp. 289–91.
- [2] TROY C.T., Photonics Spectra 28, 1992, p. 289.
- [3] KARNER J., PEDRAZZINI M., REINECK J., SJOSTRAND M.E., BERGMANN E., CVD diamond coated cemented carbide cutting tools, Materials Science and Engineering A 209(1–2), 1996, pp. 405–13.
- [4] GRAEBNER J.E., JIN S., KAMMLOTT G.W., HERB J.A., GARDINIER C.F., Large anisotropic thermal conductivity in synthetic diamond films, Nature 359(6394), 1992, pp. 401–3.
- [5] KNIGHT D.S., WHITE W.B., Characterization of diamond films by Raman spectroscopy, Journal of Materials Research 4(2), 1989, pp. 385–93.
- [6] VORLICEK Y., ROSA J., VANECEK M., NESLADEK M., STALS L.M., Quantitative study of Raman scattering and defect optical absorption in CVD diamond films, Diamond and Related Materials 6(5–7), 1997, pp. 704–7.
- [7] WADA N., GACZI P.J., SOLIN S.A., “Diamond-like” 3-fold coordinated amorphous carbon, Journal of Non-Crystalline Solids 35–36, 1980, pp. 543–8.
- [8] FABISIAK K., MAAR-STUMM M., BLANK E., Defects in chemically vapour-deposited diamond films studied by electron spin resonance and Raman spectroscopy, Diamond and Related Materials 2(5–7), 1993, pp. 722–7.
- [9] LOUBSER J.H.N., VAN WYK J.A., Electron spin resonance in the study of diamond, Reports on Progress in Physics 41(8), 1978, pp. 1201–48.
- [10] CALLAWAY J., Model for lattice thermal conductivity at low temperatures, Physical Review 113(4), 1959, pp. 1046–51.
- [11] HOLLAND M.G., Analysis of lattice thermal conductivity, Physical Review 132(6), 1963, pp. 2461–71.
- [12] PALMER M.A., BARTKOWSKI K., GMELIN E., CARDONA M., ZHERNOV A.P., INYUSHKIN A.V., TALDENKOV A., OZHOGIN V.I., ITOH K.M., HALLER E.E., Thermal conductivity of germanium crystals with different isotopic compositions, Physical Review B: Condensed Matter 56(15), 1997, pp. 9431–47.
- [13] EFIMOV V.B., MEZHOF-DEGLIN L.P., Phonon scattering in diamond films, Physica B 263–264, 1999, pp. 745–8.
- [14] UMA S., MCCONNELL A.D., ASHEGHI M., KURABAYASHI K., GOODSON K.E., Temperature-dependent thermal conductivity of undoped polycrystalline silicon layers, International Journal of Thermophysics 22(2), 2001, pp. 605–16.
- [15] FABISIAK K., Thesis of Nicolaus Copernicus University, Toruń, Poland 1994.
- [16] GRAEBNER J.E., MUCHA J.A., SEIBLES L., KAMMLOTT G.W., The thermal conductivity of chemical-vapor-deposited diamond films on silicon, Journal of Applied Physics 71(7), 1992, pp. 3143–6.
- [17] KADING O.W., MATTHIAS E., ZACHAI R., FUSSER H.-J., MUNTZINGER P., Thermal diffusivities of thin diamond films on silicon, Diamond and Related Materials 2(8), 1993, pp. 1185–90.
- [18] BERTOLOTTI M., LIAKHOU G.L., FERRARI A., RALCHENKO V.G., SMOLIN A.A., OBRAZTSOVA E., KOROTOUSHENKO K.G., PIMENOV S.M., KONOV V.I., Measurements of thermal conductivity of diamond films by photothermal deflection technique, Journal of Applied Physics 75(12), 1994, pp. 7795–8.
- [19] BACHMANN P.K., HAGEMANN H.J., LADE H., LEERS D., WIECHERT D.U., WILSON H., FOURNIER D., PLAMANN K., Thermal properties of C/H-, C/H/O-, C/H/N- and C/H/X-grown polycrystalline CVD diamond, Diamond and Related Materials 4(5–6), 1995, pp. 820–6.
- [20] ONO A., BABA T., FUNAMOTO H., NISHIKAWA A., Thermal conductivity of diamond films synthesized by microwave plasma CVD, Japanese Journal of Applied Physics, Part 2: Letters and Express Letters 25(10), 1986, pp. L808–10.
- [21] VON KAENEL Y., PhD Thesis No. 1624, EPFL Lausanne, Switzerland, 1997.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPW7-0002-0066