Uncertainty of atomic force microscopy measurements

• Autorzy: Gotszalk T.P. , Janus P. , Marendziak A. , Szeloch R.F.
• Języki publikacji: EN

Abstrakty

EN

We consider the problem of uncertainty in geometrically linear measurements in scanning probe microscopy (SPM) represented by atomic force microscopy (AFM). The uncertainties under consideration are associated both with quantum phenomena in the space cantilever tip--sample surfaces and with effects of dynamic behavior of electronic and optic measurement and control systems. In our experiment, we have analyzed uncertainty of calibrated atomic force microscopy (C-AFM) measurement in two dimensions. Uncertainty of measurements has been estimated according to GUM procedure.

Słowa kluczowe

EN

uncertainty of measurement; atomic force microscopy (AFM)

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2007
• Tom: Vol. 37, nr 4
• Strony: 397--403
• Opis fizyczny: Bibliogr. 22 poz.

Twórcy

autor

Gotszalk T.P.

autor

Janus P.

autor

Marendziak A.

autor

Szeloch R.F.

• Faculty of Microsystem Electronics and Fotonics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland

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