Structural, optical and electrical characterization of Co-Pd doped TiO2 semiconducting thin films sputtered on silicon

• Autorzy: Domaradzki J. , Prociów E. , Kaczmarek D. , Berlicki T. , Kudrawiec R. , Misiewicz J. , Mielcarek W.
• Języki publikacji: EN

Abstrakty

EN

The fundamental structural, electrical and optical properties of junction-based devices composed of semiconducting thin films of metal oxide on a semiconductor were examined. Thin films were deposited on silicon and silica substrates by hot target reactive magnetron sputtering process. During the deposition base TiO2 films were doped with Co, Pd transition metals. Electrical and optical beam induced current (OBIC) analysis confirmed the formation of a junction based on a semiconduting thin film of metal oxide–semiconductor interface

Słowa kluczowe

EN

thin films; magnetron sputtering; hot target; oxide semiconductors; heterojunction

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2003
• Tom: Vol. 33, nr 4
• Strony: 661--668
• Opis fizyczny: Bibliogr. 16 poz., rys.

Twórcy

autor

Domaradzki J.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland

autor

Prociów E.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland

autor

Kaczmarek D.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland

autor

Berlicki T.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland

autor

Kudrawiec R.

• Institute of Physics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wroclaw, Poland

autor

Misiewicz J.

• Institute of Physics, Wrocław University of Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wroclaw, Poland

autor

Mielcarek W.

• Electrotechnical Institute, ul. Marii Sklodowskiej-Curie 55-61, 50-369 Wroclaw, Poland

Bibliografia

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