Surface profilometry by a holographic confocal microscopy

• Autorzy: Chmelík R. , Lovicar L. , Harna Z.
• Języki publikacji: EN

Abstrakty

EN

Confocal imaging by a holographic confocal microscope is based on the real-time incoherent holography. Besides the image amplitude, the image phase is inherently reconstructed. In this paper, we demonstrate that the phase image component can be converted into the height map of the specimen surface, and, in this way, we can measure the surface profile with the precision of several nanometers. The possible ambiguity in the height determination of large height steps is overcome owing to the depth-discrimination property of the microscope. The axial resolution required for this purpose is achieved using broadband illumination.

Słowa kluczowe

EN

profilometry; confocal microscopy; holographic applications; interferometry

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2003
• Tom: Vol. 33, nr 2-3
• Strony: 381--389
• Opis fizyczny: Biibliogr. 9 poz., rys.

Twórcy

autor

Chmelík R.

• Brno University of Technology, Technicka 2, CZ-616 69 Brno, Czech Republic

autor

Lovicar L.

• Brno University of Technology, Technicka 2, CZ-616 69 Brno, Czech Republic

autor

Harna Z.

• Brno University of Technology, Technicka 2, CZ-616 69 Brno, Czech Republic

Bibliografia

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• [2] Wilson T., Confocal Microscopy, [In] Confocal Microscopy [Ed.] T. Wilson, Academic Press, London 1990.
• [3] Jordan H.J., Wegner M., Tiziani H., Meas. Sci. Technol. 9 (1998), 1142.
• [4] Hamilton D.K., Matthews H.J., Optik 71 (1985), 31.
• [5] Chmelík R., Harna Z., Opt. Eng. 38 (1999), 1635.
• [6] Indebetouw G., Klysubun P., Opt. Lett. 25 (2000), 212.
• [7] Chmelik R., Correlation Microscopy, Alternative Method of Many-Channel Confocal Imaging, Vutium, Brno 2002 (in Czech).
• [8] Goodman J.W., Statistical Optics, Wiley, New York 1985, p. 500.
• [9] Chmelík R., Proc. SPIE4356 (2001), 118.