Spectral ellipsometry of binary optic gratings

• Autorzy: Pištora J. , Yamaguchi T. , Vlček J. , Mistrik J. , Horie M. , Smatko V. , Kováčová E. , Postava K. , Aoyama M.
• Języki publikacji: EN

Abstrakty

EN

The coupled wave method (CWM) has been applied to the description of electromagnetic wave propagation in binary optic gratings. The electromagnetic field and the permittivity profile are expanded into two-fold Fourier series. The reflection coefficients of 2D periodical structures have been specified and the ellipsometric angles of the shapes discussed have been computed. The theo-retical results are compared with experimental data obtained on SiO2 square dots on Si substrate. The measurements were performed using computer controlled four zone null ellipsometer in spectral range from 240 nm to 700 nm. The influence of SiO2 ultrathin oxidation layer and thickness of dots on spectral ellipsometric angles is also discussed

Słowa kluczowe

EN

lamellar grating; spectral ellipsometry

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2003
• Tom: Vol. 33, nr 2-3
• Strony: 251--262
• Opis fizyczny: Bibliogr. 24 poz., rys.

Twórcy

autor

Pištora J.

• Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Japan
• Department of Physics, Department of Mathematics, Technical University Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic

autor

Yamaguchi T.

• Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Japan

autor

Vlček J.

• Department of Physics, Department of Mathematics, Technical University Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic

autor

Mistrik J.

• Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Japan

autor

Horie M.

• Dainippon Screen Manufacturing Company Ltd., Kyoto, Japan

autor

Smatko V.

• Institute of Electrical Engineering, Slovak Academy of Sciences, Dubravska cesta 9, Bratislava, Slovak Republic

autor

Kováčová E.

• Institute of Electrical Engineering, Slovak Academy of Sciences, Dubravska cesta 9, Bratislava, Slovak Republic

autor

Postava K.

• Department of Physics, Department of Mathematics, Technical University Ostrava, 17. listopadu 15, 708 33 Ostrava-Poruba, Czech Republic

autor

Aoyama M.

• Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu 432, Japan

Bibliografia

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