Non-standard techniques of surface characterization in scanning electron microscope

• Autorzy: Słówko W. , Drzazga W.
• Języki publikacji: EN

Abstrakty

EN

In this paper the specific techniques considerably extending the capabilities of a standard scanning electron microscopy (SEM) for quantitative topographic and voltage contrasts, supplemented by those concerning the low energy and the high pressure microscopy, are discussed. The techniques involve special detector systems combined with proper signal processing units. They have been designed mainly for investigations of semiconductor materials and devices, however they may be also useful in other fields of technology

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2002
• Tom: Vol. 32, nr 3
• Strony: 425--430
• Opis fizyczny: bibliogr. 8 poz.

Twórcy

autor

Słówko W.

autor

Drzazga W.

• The Faculty of Microsystems Electronics and Photonic, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wrocław