Computer controlling of MOVPE process

• Autorzy: Piasecki T. , Kośnikowski W. , Paszkiewicz B. , Panek M.
• Języki publikacji: EN

Abstrakty

EN

The metalorganic vapour phase epitaxy (MOVPE) technology requires precise control of growth process. Systems designed and built in our laboratory are equipped with two microcontroller-based device. The first one is used for driving pneumatic valves, mass flow controllers and pressure controllers, the second one is responsible for PID control of epitaxial reactor temperature. This paper describes the software designed to supervise both of these devices in order to make using of MOVPE system more efficient and less error-prone, as well as to provide help in emergency situations

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2002
• Tom: Vol. 32, nr 3
• Strony: 417--420
• Opis fizyczny: bibliogr. 2 poz.

Twórcy

autor

Piasecki T.

autor

Kośnikowski W.

autor

Paszkiewicz B.

autor

Panek M.

• The Faculty of Microsystem Electronics and Photonic, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wrocław