Low energy ion beam-induced modification of InSb surface studied at nanometric scale

• Autorzy: Krok F. , Kołodziej J.J. , Such B. , Piątkowski P. , Szymoński M. , Odendaal R.Q. , Malherbe J.B.
• Języki publikacji: EN

Abstrakty

EN

Atomically flat InSb(001) surface has been prepared with cycles of sputter-cleaning and annealing. The surface structure has been characterized by low energy electron diffraction (LEED) and by atomic force microscopy (AFM). Then the surface has been bombarded with 4 keV Ar+ ions incident 50° off normal, and the morphological changes have been studied with the AFM as a function of the ion dose. It was found that the surface was amorphized already for low ion doses (~2×1015/cm2). At higher ion doses (of 2×1016/cm2) the surface appeared to be covered with the system of parallel nanowires running along surface projection of the ion beam direction. Typical sizes of the nanowires were: 1.5–2 mm length, 50–70 nm width and height 5–7 nm.

• Wydawca: Oficyna Wydawnicza Politechniki Wrocławskiej
• Czasopismo: Optica Applicata
• Rocznik: 2002
• Tom: Vol. 32, nr 3
• Strony: 221--226
• Opis fizyczny: bibliogr. 12 poz.

Twórcy

autor

Krok F.

autor

Kołodziej J.J.

autor

Such B.

autor

Piątkowski P.

autor

Szymoński M.

autor

Odendaal R.Q.

autor

Malherbe J.B.

• Regional Laboratory and Physicochemical Analyses and Structural Research, Jagiellonian Univesity, ul. Ingardena 3, 30-060 Kraków