Object-oriented model of comb drive microactuator

• Autorzy: Wiak S. , Smółka K.

Warianty tytułu

PL

Zorientowany obiektowo model mikroaktuatora grzebieniowego

• Języki publikacji: EN

Abstrakty

EN

The paper describes methods of electrostatic comb drive structure accelerometers (MEMS) design and analysis based on mechanical and electrostatic structural models. Accelerometers design is a highly interdisciplinary area and, therefore, different methods and tools have to be exploited. Both, mechanical and electric models of accelerometers give the input data for defining the object-oriented model, based on Matlab-Simulink platform, fulfilling the general demand of dynamic behaviour simulation of comb drive structure. The proposed by authors methodology valuable contribution to MEMS design methodology.

PL

Artykuł opisuje metody projektowania elektrostatycznych struktur grzebieniowych akcelerometrów MEMS i analizę opartą na mechanicznych i elektrostatycznych modelach strukturalnych. Projektowanie akcelerometrów MEMS jest zadaniem interdyscyplinarnym, w związku z tym, podczas projektowania muszą być wykorzystane różne metody projektowania. Mechaniczne i elektrostatyczne modele akcelerometrów umożliwiły zdefiniowanie Modelu Zorientowanego Obiektowo, opartego na platformie Matlab-Simulink, który pozwolił na symulacje zachowania rozważanej struktury grzebieniowej na wymuszenia dynamiczne. Proponowana przez Autorów metodologia jest wartościowym wkładem w metodologię projektowania MEMS. Przedstawioną metodologię można również zaadaptować do projektowania innych, multidyscyplinarnych systemów MEMS.

Słowa kluczowe

EN

accelerometer; MEMS; object-oriented modelling; vector field modelling

PL

akcelerometr; MEMS; modelowanie obiektowe; modelowanie pola wektorowego

• Wydawca: Polish Academy of Sciences, Committee on Electrical Engineering
• Czasopismo: Archives of Electrical Engineering
• Rocznik: 2007
• Tom: Vol. 56, nr 2
• Strony: 149--162
• Opis fizyczny: Bibliogr. 29 poz., rys.

Twórcy

autor

Wiak S.

autor

Smółka K.

• Institute of Mechatronics and Information Systems, Technical University of Lodz,

Bibliografia

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