Impedance spectroscopy : tool for structure investigation of thin semiconductor films

Kazimierski, P.

Artykuł - szczegóły

Tytuł artykułu

Impedance spectroscopy : tool for structure investigation of thin semiconductor films

Autorzy

Kazimierski P.

Identyfikatory

Warianty tytułu

Języki publikacji

Abstrakty

Impedance spectroscopy is sensitive and easy to use experimental technique which can provide significant information on material structure. It is particularly effective in investigation of semiconductor heterostructure consisting of phases characterized by different permeativity. In this case impedance spectroscopy enables estimation of the phase distribution, specific dimension and shape. In this paper a range of experimental results obtained for: amorphous silicon, microcrystalline silicon, porous silicon, hydrogenated carbon-germanium semiconductors is reviewed. A special attention has been devoted to analysis of experimental data by means of equivalent circuit method.

Słowa kluczowe

plasma polymers nanostructure impedance spectroscopy ac conductivity

plazma polimery nanostruktura spektroskopia przewodność właściwa

Wydawca

Centrum Materiałów Polimerowych i Węglowych PAN

Czasopismo

Polish Journal of Applied Chemistry

Rocznik

2005

Tom

Vol. 49, nr 1-2

Strony

111--122

Opis fizyczny

Bibliogr. 51 poz., Rys. 5

Twórcy

autor

Kazimierski P.

Faculty of Process and Environmental Engineering, Technical University of Łódź, Wólczańska 213, 93-005 Łódź, Poland, piotrkaz@wipos.p.lodz.pl

Bibliografia

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Bibliografia

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