Diamond-like carbon and diamond films as source of electron emission

Staryga, E.; Znamirowski, Z.; Jarzyńska, D.; Fabisiak, K.; Banaszak, A.; Cłapa, M.

Artykuł - szczegóły

Tytuł artykułu

Diamond-like carbon and diamond films as source of electron emission

Autorzy

Staryga E. , Znamirowski Z. , Jarzyńska D. , Fabisiak K. , Banaszak A. , Cłapa M.

Identyfikatory

Warianty tytułu

Cienkie warstwy węgla diamnetopodobnego i diamentu jako źródło emisji polowej elektronów

Języki publikacji

Abstrakty

We investigated electron field emission from diamond-like carbon and diamond thin layers. DLC and diamond films were deposited onto Si substrate using Radio Frequency Chemical Vapour Deposition process and Hot Filament Chemical Vapour Deposition technique, respectively. The field emission characteristics were described using the Fowler-Nordheim model. To analyze the surface morphology Raman spectroscopy, Electron Spin Resonance (ESR) and Scanning Electron Microscopy (SEM) was used. We obtained well-defined Raman spectrum peak for diamond films at 1332 cm^-1^{.The Raman spectrum, for DLC layers, showed asymmetric peak consist of D and G-band around 1550 cm}^-1^{. It indicate for existence of sp}³ (diamond) and s² (graphite) phase in these films. The field emission for DLC films was obtained at turn-on electric field between 70-90 V/μ while for diamond films in a range between 60-140 V/μ. It seems that changes of turn-on field values and emissive properties of thin carbon layers may be cause by different content graphite phase in carbon films.

Przebadano elektronową emisje polową węgla diamentopodobnego(DLC) i cienkich warstw diamentowych. Charakterystyki emisji polowej zostały opisane w oparciu o model Fowlera-Nordheima. Do analizy morfologii powierzchni zastosowano spektroskopię Ramana, elektronowy rezonans spinowy (ESR) oraz skaningowa mikroskopie elektronowa (SEM). Otrzymano wyraźne widma Ramana dla cienkich warstw diamentowych z maksimum przy 1332 cm^-1. Widmo Ramana dla warstw DLC przedstawia asymetryczne składoweDorazG(1550 cm^-1). Ta ostatnia świadczy o istnieniu faz sp³ (diament) oraz sp²^{(grafit) w tych warstwach. Emisja polowa dla warstw DLC uzyskana była przy ustalonym na 70-90 V/μ.m natężeniu pola elektrycznego, zaś dla warstw diamentowych w przedziale 60-140 V/μm. Pomiary wskazują, że zmiany wartości przyłożonego pola i właściwości emisyjnych cienkich warstw węgla mogą być wywołane różną zawartością fazy grafitowej w warstwach węglowych.}

Słowa kluczowe

field emission diamond-like carbon DLC diamond films

emisja polowa węgiel diamentopodobny warstwy diamentowe cienkie warstwa diamentowa

Wydawca

Wydawnictwo Górnicze Sp. z o.o.

Czasopismo

Karbo

Rocznik

2005

Tom

Nr 4

Strony

244--251

Opis fizyczny

Bibliogr. 37 poz.

Twórcy

autor

Staryga E.

estaryga@p.lodz.pl

Institute of Physics, Technical University of Łódź

autor

Znamirowski Z.

Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology

autor

Jarzyńska D.

The Faculty of Mechanical Engineering, Technical University of Łódź

autor

Fabisiak K.

Chair of Physics, Kazimierz Wielki University, Bydgoszcz, Department of Biophysics, Collegium Medicum N. Copernicus Univ., Bydgoszcz

autor

Banaszak A.

Chair of Physics, Kazimierz Wielki University, Bydgoszcz

autor

Cłapa M.

The Faculty of Mechanical Engineering, Technical University of Łódź

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Typ dokumentu

Bibliografia

Identyfikator YADDA

bwmeta1.element.baztech-article-BPP1-0059-0029