Tytuł artykułu
Autorzy
Identyfikatory
Warianty tytułu
Konferencja
"New Carbon Materials" / sympozjum (1; 1999: Ustroń-Jaszowiec, Poland)
Języki publikacji
Abstrakty
Structural and electrical properties of thin diamond films have been studied and discussed in terms of deposition conditions. Diamond films were produced by Hot-Filament CVD (HF-CVD) method modified by doping and electron bombardment of growing surface. Morphological changes were investigated by the scanning electron microscopy (SEM) method reproducing shape of diamond surface. Parameters characterising quality of deposited samples were estimated from Raman scattering measurements. Furthermore, analysis of X-ray scattering data based on Debye-Scherrer equation is described resulting in estimation of grain size and level of stresses of the CVD diamond films. Finally, I-V characteristics of investigated samples are plotted. They are discussed in terms of rectifying properties of such structures caused by distortions of the lattice (Martin's model).
Czasopismo
Rocznik
Tom
Strony
81--93
Opis fizyczny
Bibliogr. 3 poz.
Twórcy
autor
- Division of Radiospectroscopy and Physics of Carbon, Institute of Physics Nicolas Copernicus University, ul. Grudziądzka 5/7,87-100 Toruń
autor
- Division of Radiospectroscopy and Physics of Carbon, Institute of Physics Nicolas Copernicus University, ul. Grudziądzka 5/7,87-100 Toruń
autor
- Division of Radiospectroscopy and Physics of Carbon, Institute of Physics Nicolas Copernicus University, ul. Grudziądzka 5/7,87-100 Toruń
autor
- Division of Microelectronics, Institute of Physics, Nicolas Copernicus University, ul. Grudziądzka 5/7,87-100 Toruń
autor
- Division of Microelectronics, Institute of Physics, Nicolas Copernicus University, ul. Grudziądzka 5/7,87-100 Toruń
Bibliografia
- [1] K. SPEAR and J.DISMUKES, Synthetic diamond- Emerging CVD science and technology New York 1994.
- [2] E. FITZER and F. ROZPŁOCH, HT-HP, 20,449, (1988).
- [3] R.M. MARTIN, Phys. Rev. B, vol. 1 (1970), No 10, p. 4004.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPP1-0021-0094