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Wybrane pełne teksty z tego czasopisma
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Warianty tytułu
Skład i uszkodzenia radiacyjne krzemu w strukturach warstwa Co – podłoże krzemowe wytwarzanych w warunkach dynamicznego mieszania jonowego
Języki publikacji
Abstrakty
The composition, radiation damage and morphology of silicon modified by means of self – ion assisted Co deposition was investigated.
Zbadano skład i uszkodzenia radiacyjne krzemu zmodyfikowanego podczas naniesienia powłok Co metodą dynamicznego mieszania jonowego.
Słowa kluczowe
Wydawca
Czasopismo
Rocznik
Tom
Strony
122--124
Opis fizyczny
Bibliogr. 21 poz., rys., tab., wykr.
Twórcy
autor
autor
autor
- Belarusian State Pedagogical University, Sovetskaja str. 18, 220050 Minsk
Bibliografia
- [1] Colligon J.S., Energetic condensation: Proceses, properties and products, J. Vac. Sci. Techn., A13 (1995), 1649-1657
- [2] Pederson L.R., Singh P., Zhou X.-D., Application of vacuum deposition methods to solid oxide fuel cells, Vacuum, 80 (2006), 1066-1083
- [3] Car ter G., Colligon J., Tashlykov I. S., A simple theory and experimental investigation of ion assisted deposition of cobalt on silicon, J. Adv. Mater. 5 (1999), 1-6
- [4] Ensinger W., The influence of ion flux density on the properties of molybdenum films deposited from the vapor phase under simultaneous argon ion irradiation, Thin Solid Films, 275 (1996),54-57
- [5] Tashlykov I.S., Belyi I.M., Bobrovich O.G., et al., On the efficiency of deposited energy for ion beam mixing processes with ion implanted during and after thin metal film deposition, Nucl. Instr. Meth., B80/81 (1993), 98-101
- [6] Gusev I. V., Mochnyuk A.A., Chaplyuk V. I., et al., Some particular features of the condensation process, structure and properties of thin metal films caused by self-ion bombardment, Appl. Surf. Sci., 91 (1995), 182-186
- [7] Gotoh Y., Amioka T., Tsuji H. et al., Metal ion beam self-sputtering eposition system, Rev. Sci. Instrum., 67 (1996), 1996-1999
- [8] Bobrovich O.G., Tashlykov I. S. Structure and composition of Zr thin films deposited on silicon using ion assistance, Phys. Chem. Treat. of Mater., 5 (2002), 40-43
- [9] Tashlykov I.S, Kasperovich A.V., Wolf G.K., Elastomer surface modification by means of SIAD of metal-based layers, Surf. Coat. Technol. 158-159 (2002), 498-502
- [10] Tashlykov I.S. , Zukowski P.V., Baraishuk S.M., et al., Analysis of the composition of Ti-based thin films deposited on silicon by means of self-ion assisted deposition, Rad. Effects & Defects in Solids, 162, (2007), 637-641
- [11] Tashlykov I., Veres O., Zukowski P., Kosak Ch. Influence of ion assisted deposition Ti and Zr coatings on rubber wettability, Przeglad Elektrotechniczny, 84 (2008), 108-110
- [12] Doolittle L., A semiautomatic algorithm for Rutherford backscattering analysis, Nucl. Instr. Meth., B15 (1986), 227-238
- [13] Bögh E., Defect studies in crystals by means of channeling, Canad. J. of Phys., 46 (1968), 653-659
- [14] Weiser M., Kalbitzer S., Zinke-Allmang M. et al.,Low temperature implantation and analysis techniques for hydrogen in metals, Mater. Sci. and Engin., 69 (1985), 411-418
- [15] Jan S., Kalbitzer S., Oberschachtsiek P. et al., 15N Doppler spectroscopy of1H on diamond, Nucl. Instr. Math., B85 (1994), 321-325
- [16] Tashlykov I.S., Bobrovich O.G. , Radiation damage of Si wafers modified by means of thin layer ion assisted deposition, Vacuum, 78 (2005), 337-340
- [17] Pauleau Y, editor, Materials and Processes for Surface and Interface Engineering: Kluwer Academic Publishers, (1995), 475 p.
- [18] Martynenko Yu.V., Carter G., Stress evolution in ion assisted thin metal film deposition, Rad. Effects & Defects in Solids 132 (1994), 103-118
- [19] Bobrovich O.G., Tashlykov I. S., Tuljev V.V. et al., Nuclear physic techniques study of metal-based (Ti, Co) coatings deposited on silicon in conjunction with ion assisting, Phys. Chem. Treat. of Mater., No.1 (2006), 54-58
- [20] Vistrom R.E., Brgesen P., Sass S.L., Deuterium trapping in evaporated metal films, Acta. Metall. Mater., 41 (1993), 3549-3555
- [21] Waidinger A, Nagengast D, Rehm Ch, et al. , Thin Solid Films 1996;275:48
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPOC-0057-0037
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