Temperature measurement using a Chx/porous silicon/Si structure encapsulated in a CO2 rich environment

• Autorzy: Chiali A. , Ghellai N. , Gabouze N. , Sari N.
• Języki publikacji: EN

Abstrakty

EN

This work reports on the possible use of microporous silicon as a temperature sensor. This work is based on previous published works [7, 8, and 9]. The device is based on hydrocarbon group (CHx) / porous silicon (PS) /Si structure. The porous sample was coated with hydrocarbons groups deposited by the plasma of methane /argon mixture. Current–voltage characteristics have been investigated as a function of temperature in the range 200C-70°C.The results show that for a constant voltage in the range 0.7-1V, the current increases linearly with the environment temperature reaches a maximum at 70°C and then stabilizes. This result suggests that the developed structure can be used for sensing temperatures not exceeding 70°C.

Słowa kluczowe

EN

porous silicon; temperature sensor; carbon dioxide

• Wydawca: Politechnika Gdańska
• Czasopismo: Advances in Materials Science
• Rocznik: 2010
• Tom: Vol. 10, nr 2(24)
• Strony: 4--10
• Opis fizyczny: Bibliogr. 23 poz., rys., tab.

Twórcy

autor

Chiali A.

autor

Ghellai N.

autor

Gabouze N.

autor

Sari N.

• University, Bp 119, Tlemcen, ALGERIA

Bibliografia

• 1. Chursanova M.V., Germash L.P., Yukhymchuk V.O., Dzhagan V.M., Khodasevich I.A., Cojoc D., Applied Surface Science, 256 (2010), 3369-3373.
• 2. Vitanov P., Goranova E., Stavrov V., Ivanov P., Singh P.K., Solar Energy Materials and Solar Cells, 93 (2009), 297-300.
• 3. Kanungo J., Saha H., Basu S., Sensors and Actuators B: Chemical, 140 (2009), 65-72.
• 4. Müller G, Friedberger A., Knese K., Handbook of Silicon Based MEMS Materials & Technologies (First edition), 2010, 409-431.
• 5. Bazrafkan I, Dariani R.S., Physica B: Condensed Matter, 404, 2009, 1638-1642.
• 6. Yuan Ming Huang, Fu-fang Zhou, Bao-gai Zhai, Lan-li Chen, Solid State Ionics, 179 (2008), 1194-1197.
• 7. Baranauskas V, Peterlevitz A.C., Chang D.C., Durrant S.F., Applied Surface Science, 185 (2001), 108-113.
• 8. Chursanova M.V., Germash L.P., Yukhymchuk V.O., Dzhagan V.M., Khodasevich I.A., Cojoc D., Applied Surface Science, 256 (2010), 3369-3373.
• 9. Gabouze N., Benzekkour N., Mahmoudi B., Belhousse S., Cheraga H., Ghellai N., Applied Surface Science 254 (2008), 3648–3652.
• 10. H. Cheraga, S. Belhousse, N. Gabouze. Applied Surface Science 238 (2004) 495–500.
• 11. Gabouze N, Belhousse S, Cheraga H, Ghellai N, Ouadah Y, Belkasem Y, Keffous A. Vacuum 80 (2006), 986-989.
• 12. Zito F., Aquilino F., Fragomeni L., Merenda M., Della Corten F., Sensors and Actuators A: Physical, 158 (2010), 169-175.
• 13. Il Young Han, Sung Jin Kim., Sensors and Actuators A: Physical, 141 (2008), 52-58.
• 14. Keränen K., Mäkinen J-T, Korhonen P., Juntunen E., Heikkinen V., Mäkelä J., Sensors and Actuators A: Physical, 158 (2010), 161-167.
• 15. Nanosilicon, 2008, 149-175 James L. Gole, Stephen E. Lewis
• 16. Handbook of Silicon Based MEMS Materials & Technologies (First edition), 2010, Pages 409-431. Gerhard Müller, Alois Friedberger, Kathrin Knese.
• 17. Ouchabane M, Aoucher M., Sekkal A., Henda K., Lahmar H., Proceeding of the 16th International Symposium on Plasma Chemistry, Taormina, Italy, 2003, p. 410.
• 18. Ouchabane M., Tadjine R., Lahmar H., Zekara M., Henda K., Kessi O., Proceeding of the 14th international Symposium on Plasma Chemistry, vol. IV, Prague, Czech Republic, 1999, p. 1709.
• 19. Tucci M., La Ferrara V., Della Noce M., Massera E., Quercia L., Non-Cryst J., Solids 338–340 (2004), 776.
• 20. Mulloni V. Gaburro Z., Pavesi L. Porous silicon microactivities as optical chemical sensor. Proceeding of Porous Semiconductors-Sciences and Technology, PSST-2, Madrid, Spain, 12-17 March, 2000, 101.
• 21. Jalkanen T., Tuura J., Mäkilä M, SalonenJ., Sensors and Actuators B: Chemical, In Press, Corrected Proof, Available online 9 March 2010.
• 22. Ait Hamouda K., Gabouze N., Hadjersi T., Benrekaa N., Outemzabet R., Cheraga H., Beldjilali K., Mahmoudi B.R., Sol. Energy Mater. Sol. Cells 76 (2003) 535.
• 23. Adamyan Z., Adamian V., Aroutiounian. Physica E, 38, (2007), 164-167 A.