Optoelectronic system for investigation of CVD diamond/DLC layers growth

• Autorzy: Wroczyński P. , Bogdanowicz R. , Gnyba M.
• Języki publikacji: EN

Abstrakty

EN

Development of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during ěPA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The system uses multi-point Optical Emission Spectroscopy (OES) and long-working-distance Raman spectroscopy. Dissociation of H2 molecules, excitation and ionization of hydrogen atoms as well as spatial distribution of the molecules are subjects of the OES investigation. The most significant parameters of the deposited film like molecular composition of the film can be investigated by means of Raman spectroscopy. Results of optoelectronic investigation will enable improvement of CVD process parameters and synthesized DLC films quality.

Słowa kluczowe

EN

temperature; power input; heat source

• Wydawca: Politechnika Gdańska
• Czasopismo: Advances in Materials Science
• Rocznik: 2009
• Tom: Vol. 9, nr 3(21)
• Strony: 47--53
• Opis fizyczny: Bibliogr. 15 poz., rys., fot.

Twórcy

autor

Wroczyński P.

autor

Bogdanowicz R.

autor

Gnyba M.

• Gdansk University of Technology, Faculty of Electronics, Telecommunication and Informatics, Department of Optoelectronics and Electronic Systems, Gdansk, Poland

Bibliografia

• 1. May P.W., Tsai H.Y., Wang W., Smith J.A.: Deposition of CVD Diamond onto GaN, Diam. Rel. Mat. 15(4-8) (2006) pp. 526-530.
• 2. Hsiao-Kuo C., Sung J. C.: The rapid growth of thin transparent films of diamond, Diam. Rel. Mat. 10 (2001) pp. 1584.
• 3. May P.W.: The New Diamond Age?, Science 319 (2008) pp. 490.
• 4. Smietana M., Szmitdt J., Korwin-Pawlowski M.L., Bock W.J.: Diamond-like carbon films deposited onto optical fibres and waveguides: application in chemical sensing, Proc. SPIE 6189 (2006) pp. 186-195.
• 5. Herman A., Wroczynski P.: Microwave plasma assisted chemical vapour deposition for thin diamond film synthesis, Adv. Sci. and Technol. 6 (1995) pp. 141.
• 6. Bogdanowicz R., Gnyba M., Wroczynski P.: Optoelectronic monitoring of plasma discharge optimized for thin diamond film synthesis, J. Phys. IV 137 (2006) pp. 137 57.
• 7. Gnyba M., Bogdanowicz R.: Design and simulation of excitation laser system for in-situ Raman monitoring, Europ. Phys. J. ST 144 (2007) pp. 209-214.
• 8. Chen P.H., Lin C.L., Liu Y.K., Chung T.Y., Cheng-Yi L.: Diamond Heat Spreader Layer for High-Power Thin-GaN Light-Emitting Diodes, IEEE Phot. Technol. Lett. 20 (2008) pp. 845-847.
• 9. Zuo S, Yaran M., Grotjohn T.: Investigation of diamond deposition uniformity and quality for freestanding film and substrate applications, Diam. Rel. Mat. 17(3) (2008) pp.300-305.
• 10. Bogdanowicz R.: Investigation of H2:CH4 plasma composition by means of spatially resolved optical spectroscopy, Acta Phys. Pol. A. 114 (2008) pp.6-A.
• 11. Sobelman I.: Atomic Spectra and Radiative Transitions, Berlin, Springer-Verlag, 1992.
• 12. Asmussen J., Reinhard D., Dandy D.S.: Diamond Thin Films Handbook, New York, Marcel Dekker Inc., 2002.
• 13. Fabisiak K.: Analiza defektow w cienkich polikrystalicznych warstwach diamentowych otrzymywanych metodami CVD, Torun, Wydawnictwo UMK, 1994.
• 14. Mermoux M., Marcus B., Abello L., Rosman N., Lucazeau G.: In situ Raman monitoring of the growth of CVD diamond films, J. Raman Spectroscopy 34(7-8) (2003) pp.505-514.
• 15. Bogus A., Gebeshubera I.C., Pauschitz A., Manish R., Haubner R.: Micro- and nanomechanical properties of diamond film with various surface morphologies, Diam. Rel. Mat. 17(12) (2008) pp. 1998-2004.