Surface acoustic wave hydrogen gas sensor based on layered structure of palladium/metal-free phthalocyanine

• Autorzy: Jakubik W.P. , Urbańczyk M. , Maciak E. , Pustelny T.
• Języki publikacji: EN

Abstrakty

EN

A layered sensor structure of metal-free phthalocyanine H2PC (160 nm) with a very thin film of palladium (Pd-20 nm) on the top, has been studied for hydrogen gas-sensing application at relatively low temperatures of about 30°C and about 40°C. The layered structure was obtained by vacuum deposition (first the phthalocyanine Pc and than the Pd film) onto a LiNbO3Y- cut Z-propagating substrate, making use of the Surface Acoustic Wave method, and additionally (in this same technological processes) into a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. In such a layered structure we can detect hydrogen in a medium concentration range (from 0.5 to 3% in air) even at about 30°c. At elevated tem-perature up to about 40°C the differential frequency increases proportionally (almost linearly) to the hydrogen concentration and the response reaches its steady state very quickly. The response times are about 18 s at the lowest 0.5% hydrogen concentration to about 42 s at 4% (defined as reaching 100% of the steady state). In the case of the investigated layered structure a very good correlation has been observed between the two utilized methods - the frequency changes in the SAW method correlate quite well with the decreases of the layered structure resistance.

Słowa kluczowe

EN

layered structure, metal-free phthalocyanine; palladium; hydrogen gas sensor; surface acoustic wave

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2008
• Tom: Vol. 56, nr 2
• Strony: 133--138
• Opis fizyczny: Bibliogr. 16 poz., rys.

Twórcy

autor

Jakubik W.P.

autor

Urbańczyk M.

autor

Maciak E.

autor

Pustelny T.

• Institute of Physics, Silesian University of Technology 2 Krzywoustego St., 44-100 Gliwice, Poland,

Bibliografia

• [1] W.P. Jakubik, M.W. Urbanczyk, S. Kochowski, and J. Bodzenta, “Bilayer structure for hydrogen detection in a surface acoustic wave sensor system”, Sens. Actuators, B. Chem 82, 265–271 (2002).
• [2] W.P. Jakubik, M. Urbanczyk, S. Kochowski, and J.Bodzenta, “Palladium and phthalocyanine bilayer films for hydrogen detection in surface acoustic wave sensor system”, Sens. Actuators, B. Chem 96, 321–328 (2003).
• [3] J.D. Galipeau, L.J.Le Gore, K. Snow, J.J. Caron, J.F. Vetelino, and J.C. Andle, “The integration of a chemiresistive film overlay with a surface acoustic wave microsensor”, Sens. Actuators, B. Chem 35–36, 158–163 (1996).
• [4] W. Jakubik, M. Urbanczyk, and E. Maciak, “SAW bilayer gas sensor structure with a polyethylene membrane”, XX Eurosensors 1, 124–125 (2006).
• [5] D’Amico, A. Palma, and E. Verona “Hydrogen sensor using palladium coated surface acoustic wave delay-line”, IEEE Ultrason. Symp. 1, 308–311 (1982).
• [6] A. Venema, E. Nieuwkoop, M.J. Vellekoop, W. Ghijsen, A. Barendsz, and M.S. Nieuwenhuizen, “NO2 gas-concentration measurement with a SAW-chemosensor”, IEEE Transaction on Ultrasonics, Ferroelectrics and Frequency Control UFFC-34 (2), 148–155 (1987).
• [7] W. Jakubik, “Sensor properties of bilayer structures with palladium, lead and cobalt phthalocyanines in surface acoustic wave and electric systems”, Molecular and Quantum Acoustics 25, 141–152 (2004).
• [8] W. Jakubik and M. Urbanczyk, “Hydrogen detection in surface acoustic wave gas sensor based on interaction speed”, Proc. IEEE Sensors 2004 Third International Conf. Sensors 11, 1514–1517 (2004).
• [9] W. Jakubik, “Investigations of bilayer sensor structure with copper phthalocyanine and palladium for hydrogen detection in SAW system”, J. de Physique IV 137, 95–98 (2006).
• [10] W. Jakubik, M. Urbanczyk, and A. Opilski, “Sensor properties of lead phthalocyanine in a surface acoustic wave system”, Ultrasonics 39, 227–232 (2001).
• [11] M. von Schickfus, R. Stanze., T. Kammereck, D. Weiskat, and W. Dittrich, “Improving the SAW gas sensor: device, electronics and sensor layer”, Sens. Actuators, B. Chem 18–19, 443–447 (1994).
• [12] O. Varghese, D. Gong, W. Dreschel, K. Ong, and C. Grimes, “Ammonia detection using nanoporous alumina resistive and surface acoustic wave sensors”, Sens. Actuators, B. Chem 94, 27-35 (2003).
• [13] M. Tabib-Azar, B. Sutapun, R. Petrick, and A. Kazemi, “Highly sensitive hydrogen sensors using palladium coated fiber optics with exposed cores and evanescent field interactions, Sens. Actuators, B Chem 56, 158–163 (1999).
• [14] I. Lundstr¨om, M.Shivaraman, and Ch. Svensson, “A hydrogensensitive Pd-gate MOS transistor”, J. Appl. Phys. 46, 3876–3881 (1975).
• [15] S. Ippolito, S. Kandasamy, K. Kalantar-zadeh, A. Trinchi, and W. Wlodarski, “A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen sensing”, Sensor Letters 1, 33–36 (2003).
• [16] S. Ippolito, S. Kandasamy, K. Kalantar-zadeh, and W. Wlodarski, “Layered SAW hydrogen sensor with modified tungsten trioxide selective layer”, Sens. Actuators, B. Chem 108, 553–557 (2005).