Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems

• Autorzy: Golonka L.J.
• Języki publikacji: EN

Abstrakty

EN

The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out in the Laboratory of Thick Film Microsystems at Wroc1aw University of Technology are presented. LTCC microfluidic system is described in detail. Moreover, a short information is given on other LTCC applications.

Słowa kluczowe

EN

thick film; LTCC; sensor; microsystem; microfluidic

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2006
• Tom: Vol. 54, nr 2
• Strony: 221--231
• Opis fizyczny: Bibliogr. 74 poz., 18 rys., 1 tab.

Twórcy

autor

Golonka L.J.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, 27 Wybrzeże Wyspianskiego St., 50-370 Wrocław, Poland,

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