Scanning probe microscopy as a metrology method in micro- and nanostructure investigations

• Autorzy: Gotszlak T. , Marendziak A. , Kolanek K. , Szeloch R. , Grabiec P. , Zaborowski M. , Janus P. , Rangelow I.W.
• Języki publikacji: EN

Abstrakty

EN

Evolution of many high technologies such as microelectronics, microsystem technology and nanotechnology involves design, application and testing of technical structures, whose size is being decreased continuously. Scanning probe microscopes (SPM) are therefore increasingly used as diagnostic and measurement instruments. Consequently the demand for standardized calibration routines for this kind of equipment rises. Up to now, there bas been no in generally accepted guideline on how to perform SPM calibration procedure. In this article we discuss calibration scheme and focus on several critical aspects of SPM characterization e.g. the determination of the static and dynamic physical properties of the cantilever, the influence factors which need to be considered when plotting a scheme for the calibration of the force and displacement sensitivity.

Słowa kluczowe

EN

scanning probe microscopy; micro- and nanostructure investigations

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2006
• Tom: Vol. 54, nr 1
• Strony: 19--23
• Opis fizyczny: Bibliogr. 10 poz., 8 rys., 1 tab.

Twórcy

autor

Gotszlak T.

autor

Marendziak A.

autor

Kolanek K.

autor

Szeloch R.

autor

Grabiec P.

autor

Zaborowski M.

autor

Janus P.

autor

Rangelow I.W.

• Facult y of Microsystem Electronies and Photonies, Wrocław University of Technology, 11/17 Janiszewskiego St., 50-372 Wrocław, Poland,

Bibliografia

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