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On the static and dynamic response of electrostatic actuators

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Języki publikacji
EN
Abstrakty
EN
A systematic approach for analyzing the static and dynamic electromechanical response of electrostatic actuators is presented. The analysis is based on energy methods. An analysis approach for extracting dynamic response parameters of electrostatic actuators, while only considering static states of the system, is presented. This is an efficient method for extracting the dynamic pull-in parameters because it does not require time integration of momentum equations.
Słowa kluczowe
Rocznik
Strony
373--384
Opis fizyczny
Bibliogr. 25 poz., 16 rys.
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autor
Bibliografia
  • [1] M.J. Madou, Fundamentals of Microfabrication: the Science of Miniaturization, Boca Raton, Fla, CRC Press, 2002.
  • [2] N. Maluf, Introduction to Microelectromechanical Systems Engineering, Boston: Artech House, 2004.
  • [3] M. Tabib-Azar, Microactuator: Electrical, Magnetic, Thermal, Optical, Mechanical, Chemical & Smart Structures, Boston: Kluwer Academic, 1998.
  • [4] S.D. Senturia, Microsystem Design, Boston: Kluwer Academic Publishers, 2001.
  • [5] J.A. Pelesko and D.H. Bernstein, Modelling MEMS and NEMS, Boca Raton, FL: Chapman & Hall/CRC, 2003.
  • [6] R. Legtenberg, A.W. Groeneveld, and M. Elwenspoek, “Combdrive actuators for large displacements”, Journal of Micromechanics and Microengineering 6, 20–329 (1996).
  • [7] J.D. Grade, H. Jerman, and T.W. Kenny, “Design of large deflection electrostatic actuators”, Journal of Microelectromechanical Systems 12, 335–343 (2003).
  • [8] H.J. De Los Santos, RF MEMS Circuit Design For Wireless Communications, Boston: Artech House, 2002.
  • [9] G.M. Rebeiz, RF MEMS: Theory, Design, And Technology, Hoboken, N.J.: Wiley-Interscience, 2003.
  • [10] H.A.C. Tilmans, W. De Raedt, and E. Beyne, “MEMS for wireless communications: from RF-MEMS components to RFBull. Pol. Ac.: Tech. 53(4) 2005 383 D. Elata MEMS-SiP”, Journal of Micromechanics and Microengineering 13, S139–S163 (2003).
  • [11] S. Lucyszyn, “Review of radio frequency microelectromechanical systems technology”, IEEE Proceedings-Science Measurement and Technology 151, 93–103 (2004).
  • [12] R.K. Gupta and S.D. Senturia, “Pull-in time dynamics as a measure of absolute pressure”, MEMS ’97, Nagoya, Japan, 1997.
  • [13] E.S. Hung and S.D. Senturia, “Generating efficient dynamical models for microelectromechanical systems from a few finiteelement simulation runs”, Journal of Microelectromechanical Systems 8, 280–289 (1999).
  • [14] E.K. Chan, K. Garikipati, and R.W. Dutton, “Characterization of contact electromechanics through capacitance-voltage measurements and simulations”, Journal of Microelectromechanical Systems 8, 208–217 (1999).
  • [15] L.D. Gabbay, J.E. Mehner, and S.D. Senturia, “Computer-aided generation of nonlinear reduced-order dynamic macromodels I: Non-stress-stiffened case”, Journal of Microelectromechanical Systems 9, 262–269 (2000).
  • [16] J.E. Mehner, L.D. Gabbay, and S.D. Senturia, “Computer-aided generation of nonlinear reduced-order dynamic macromodels II: Stress-stiffened case”, Journal of Microelectromechanical Systems 9, 270–278 (2000).
  • [17] M.I. Younis, E.M. Abdel-Rahman, and A. Nayfeh, “A reduced-order model for electrically actuated microbeam-based MEMS”, Journal of Microelectromechanical Systems 12, 672–680 (2003).
  • [18] D. Elata and H. Bamberger, “On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources”, Journal of Microelectromechanical Systems, 2005, (to be published).
  • [19] V. Leus and D. Elata, “The dynamic response of voltage and charge driven electrostatic switches”, MEMSWAVE 2005, Lausanne, Switzerland, 137–140 (2005).
  • [20] L. Castaner, J. Pons, R. Nadal-Guardia, and A. Rodriguez, “Analysis of the extended operation range of electrostatic actuators by current-pulse drive”, Sensors and Actuators A-Physical 90, 181–190 (2001).
  • [21] R. Nadal-Guardia, A.M. Brosa, and A. Dehe, “Constant charge operation of capacitor sensors based on switched-current circuits”, IEEE Sensors Journal 3, 835–842 (2003).
  • [22] V. Leus and D. Elata, “Fringing field effect in electrostatic actuators”, Technion – Israel Institute of Technology ETR 2004–2, 2004.
  • [23] D. Elata, O. Bochobza-Degani, and Y. Nemirovsky, “Analytical approach and numerical alpha-lines method for pull-in hypersurface extraction of electrostatic actuators with multiple uncoupled voltage sources”, Journal of Microelectromechanical Systems 12, 681–691 (2003).
  • [24] S. Pamidighantam, R. Puers, K. Baert, and H.A.C. Tilmans, “Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions”, Journal of Micromechanics and Microengineering 12, 458–464 (2002).
  • [25] O. Bochobza-Degani, D. Elata, and Y. Nemirovsky, “An efficient DIPIE algorithm for CAD of electrostatically actuated MEMS devices”, Microelectromechanical Systems 11, 612–620 (2002).
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BPG5-0012-0055
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