Thick-film gas microsensors based on tin dioxide

• Autorzy: Licznerski B.
• Języki publikacji: EN

Abstrakty

EN

Semiconductive - resistive sensors of toxic and explosive gases were fabricated from nanograins of SnO2 using thick-film technology. Sensitivity, selectivity and stability of sensors working in different temperature depend on the way the tin dioxide and additives were prepared. A construction also plays an important role. The paper presents an attitude towards the evaluation of transport of electrical charges in semiconductive grain layer of SnO2, when dangerous gases appear in the surrounding atmosphere.

Słowa kluczowe

EN

thick film; gas sensor; tin dioxide; catalyst; selectivity; sensitivity; conduction mechanism

• Wydawca: Polska Akademia Nauk, Wydział IV Nauk Technicznych
• Czasopismo: Bulletin of the Polish Academy of Sciences. Technical Sciences
• Rocznik: 2004
• Tom: Vol. 52, nr 1
• Strony: 37--42
• Opis fizyczny: Bibliogr. 20 poz., 8 rys.

Twórcy

autor

Licznerski B.

• Faculty of Microsystem Electronics and Photonics, Wroclaw University Of Technology, 11/17 Janiszewskiego St., 50-372 Wroclaw, Poland

Bibliografia

• [1] N. Taguchi, Gas detection device, British Patent 1, 280, 809 (1972).
• [2] N. Barsan, M. Schweizer-Berberich and W. Gopel, “Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors: a status report”, Fresenius J. Anal. Chem. (365), 287 (1999).
• [3] F. F. Wolkenstein, „Elektronowa teoria katalizyna półprzewodnikach”, Warszawa: PWN, 1962.
• [4] R. S. Morrison, “Semiconductor gas sensors,” Sensors and Actuators 2, 329 (1982).
• [5] N. Yamazoe, Y. Kurokawa and T. Seiyama, “Effects of additives on semiconductor gas sensors”, Sensors and Actuators B 4, 283 (1983).
• [6] W. Gopel and K. Schierbaum, “SnO2 sensor: current status and future prospects”, Sensors and Actuators B 26/27, 1 (1995).
• [7] B. W. Licznerski, L. Golonka, K. Nitsch, H. Teterycz and K. Wiśniewski, „Kompozycja ceramiczna”, Polish Patent, No 180450 (1996).
• [8] H. Teterycz, B. W. Licznerski, K. Nitsch and K. Wiśniewski, „Kompozycja ceramiczna czuła na gaz”, Polish Patent, No 183470 (1997).
• [9] H. Teterycz, B. W. Licznerski, K. Nitsch, L. Golonka and K. Wiśniewski, „Ceramicznydet ektor gazu”, Polish Patent, No 183487 (1997).
• [10] B. W. Licznerski, H. Teterycz, K. Nitsch and K. Wiśniewski, „Ceramicznydet ektor gazu”, Polish Patent, No 183508 (1997).
• [11] L. J. Golonka, J. Kozłowski and B. W. Licznerski, “The influence of the electrode material on the sensitivityof an SnO2 thick-film gas sensor”, Sensors and Actuators B 18/19, 453 (1994).
• [12] B. W. Licznerski, K. Nitsch, H. Teterycz, P. M. Szecówka and K. Wiśniewski, “Humidityinse nsitive thick-film methane sensor based on SnO2/Pt”, Sensors and Actuators B 57, 192 (1999).
• [13] B. W. Licznerski, K. Nitsch, H. Teterycz and K. Wiśniewski, “The influence of Rh surface doping on anomalous properties of thick-film SnO2 gas sensor”, Sensors and Actuators B 79, 157 (2001).
• [14] H. Teterycz, B. W. Licznerski, K. Nitsch, T. Sobański and K. Wiśniewski, “New design of thick film gas sensors with active filter”, 17th European Conference on Solid Sate Transducers, Eurosensors XVII, Guimaraes, Portugal, Sept. 2003, Book of abstracts, 552 (2003).
• [15] Z. M. Jarzebski and J. P. Marton, “Physical properties of SnO2 materials — electrical properties”, J. Electrochem. Soc. 132 (9), 229C (1976).
• [16] S. R. Morrison, “Measurement of surface state energylev els of one-equivalent adsorbates on ZnO”, Surface Sci. 27, 586 (1971).
• [17] P. Romppainen and V. Lantto, “The effect of microstructure on the height of potential energybar riers in porous tin dioxide gas sensors”, J. Appl. Phys. 63, 5159 (1988).
• [18] G. Huberechts, P. M. Szecówka, J. Roggen and B. W. Licznerski, “Simultaneous quantification of carbon monoxide and methane in humid air using a sensor arrayand artificial neural network”, Sensors and Actuators B 45, 123 (1997).
• [19] A. Szczurek, P. M. Szecówka and B. W. Licznerski, “Application of sensor arrayand neural networks for quantification of organic solvent vapours in air”, Sensors and Actuators B 58, 427 (1999).