Nanometrologia optoelektroniczna

• Autorzy: Szymański M.Z. , Owsik J. , Wiecek T.

Warianty tytułu

EN

Optoelectronic nanometrology

• Języki publikacji: PL

Abstrakty

PL

Infrastruktura metrologiczna jest konieczna do pomyślnego rozwoju nanotechnologii. Istniejące dotychczas rozwiązania metrologiczne są z reguły nieodpowiednie dla nanoskali i jest zapotrzebowanie na nowe rozwiązania osiągające nanodokładność i nadające się do badania nanoobiektów. Wśród nich metody oparte na optoelektronice są bardzo obiecujące ze względu na swój duży potencjał, relatywnie niski koszt, wysoką niezawodność i łatwość zastosowania. Celem artykułu jest przegląd optoelektronicznych metod metrologicznych, które są obiecujące dla zastosowań w nanotechnologii. Kładzimy nacisk na słowo "optoelektronika", ponieważ pomimo że prezentowane metody są optyczne w swojej zasadzie działania, ich relizacja i uzyskany wynik zależy od optoelektroniki.

EN

Metrology infrastructure is necessary for sucessful application of nanotechnology. Metrological solutions previously developed are inappropiate for nanoscale and there is need for new methods capable of reaching nanoaccuracy and investigating nanoobjects. Among them, optoelectronic methods are greatly promising due to their great potential, relative low cost, high reliability and ease of application. The purpose of this paper is to review optoelectronic metrological methods with expected applications in nanotechnology. We emphasis optoelectronics because even if methods presented are in principle optical, their realisation and performance depends on optoelectronics.

Słowa kluczowe

PL

metrologia; optoelektronika; nanotechnologia

EN

metrology; optoelectronics; nanotechnology

• Wydawca: Fundacja Nauka dla Przemysłu i Środowiska
• Czasopismo: Pomiary, Automatyka, Komputery w Gospodarce i Ochronie Środowiska
• Rocznik: 2010
• Tom: nr 4
• Strony: 15--20
• Opis fizyczny: Bibliogr. 80 poz., rys.

Twórcy

autor

Szymański M.Z.

autor

Owsik J.

autor

Wiecek T.

• Fundacja Nauka dla Przemysłu i Środowiska, Rzeszów,

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