Modelling simulation and design of micromechanical devices in ITE

• Autorzy: Łysko J.M.
• Języki publikacji: EN

Abstrakty

EN

R&D activity of the ITE Sensors Department is presented. Several types of the piezoresistive-type pressure sensors are already produced in the small scale and offered to the customers on the local market. Silicon structures' designs, housings and technology are still optimized to improve functional parameters of the devices. Other sensors are under research. Technological experiments and production are realized in cooperation with the ITE Technological Department. PSFET (Pressure Sensitive Field Effect Transistor) and DPR (Dew Point Detector) are both developed in cooperation with the Warsaw University of Technology. Capacitive and piezoresistive type acceleration sensors are the subject of the ITE individual research program, sponsored from the government founds. ISE (Ion Selective Electrodes) and m-TAS (Micro Total Analysis System) are the newly opened programs in the chemical sensor area.

Słowa kluczowe

EN

micromachine; micromachine technology; modelling; simulation

• Wydawca: Sieć Badawcza Łukasiewicz - Instytut Technologii Materiałów Elektronicznych
• Czasopismo: Materiały Elektroniczne
• Rocznik: 2001
• Tom: T. 29, nr 1-2
• Strony: 84--91
• Opis fizyczny: rys., wykr.

Twórcy

autor

Łysko J.M.

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa Poland,