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Warianty tytułu
Konferencja
12th International Scientific Conference CAM3S'2006, 27-30th November 2006, Gliwice-Zakopane
Języki publikacji
Abstrakty
Purpose: Very interesting combination of mechanical, physical and chemical properties of carbon films results in may possibilities of their industrial applications. Unfortunately the area of their usability is restricted due to poor adhesion caused by high internal stress. This problems are being solved using many different techniques including the deposition of Me:C (metal containing) gradient layers. A new deposition system allowing for simultaneous radio frequency plasma activated chemical vapour depostion (RF PACVD) and DC magnetron sputtering is presented in this paper. Design/methodology/approach: Ti:C gradient carbon layers were deposited on steel in a hybrid deposition chamber, employing radio frequency (13.56 MHz) plasma and DC magnetron sputtering. Layers with different thicknesses obtained by varied deposition parameters were examined. Friction coefficients and wear resistances were measured using the ball-on-disc method. Findings: Presented hybrid deposition system makes it possible to obtain thicker and still well adherent layers. Wear resistance was also improved noticeably and became several times better then for carbon layers with the same friction parameters. Research limitation/implications: Owed to the plasma based deposition method is the difficulty in covering complicated shapes. Use of materials other than titanium as a magnetron target, although certainly possible, is not covered in this paper. Practical implications: Ti:C gradient layers offer better wear resistance and allow for obtaining thicker carbon layers important in many tribological applications. They can be used where low friction coefficients are required. Originality/value: The combination of plasma deposition and magnetron sputtering in one process. This allows us to obtain varied gradients of chemical and phase composition in the deposited layers.
Wydawca
Rocznik
Tom
Strony
415--418
Opis fizyczny
Bibliogr. 15 poz., fot., rys.
Twórcy
autor
autor
- Institute of Materials Science and Engineering, Technical University of Lodz, ul. Stefanowskiego 1, 90-924 Łódź, Poland, clapamar@p.lodz.pl
Bibliografia
- [1] R. Hauert, An overview on the tribological behavior of dimond-like carbon in technical and medical applications, Tribology International 37 (2004) 991-1003.
- [2] A. Erdemir, Genesis of superlow friction and wear in diamondlike carbon films, Tribology International 37 (2004) 1005-1012.
- [3] S. Mitura, K. Mitura, P. Niedzielski, P. Louda, V. Danielenko, Nanocrystalline diamond, its synthesis, properties and applications, Journal of Achievements in Materials and Manufacturing Engineering, 16 (2006) 9-16.
- [4] S. Teisuke, B. Tatsuo, T. Isao, M. Tsutomu, Anti-galling property of a diamond-like carbon coated tool in aluminium sheet forming, Journal of Materials Processing Technology 104 (2000) 21-24.
- [5] M.M. Morshed, B.P. McNamara, D.C. Cameron, M.S.J. Hashimi, Stress and adhesion in DLC coatings on 316L stainless steel deposited a neutral beam source, Journal of Materials Processing Technology 141 (2003) 127-131.
- [6] W. Zhang, A. Tanaka, K. Wazami, The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayers films, Diamond and Related Materials 13 (2004) 2166-2169.
- [7] С. Donnet, Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review, Surface and Coatings Technology 100-101 (1998) 180-186.
- [8] J.C. Damasceno, S.S. Camargo Jr, F.L. Freire Jr, Deposition of Si - DLC films with high hardness, low stress and high deposition rates, Surface and Coatings Technology 133-134 (2004) 247-252.
- [9] Liu Cui, Li Guoqing, Chen Wenwu, The study of doped DLC films by Ti ion implantation, Thin Solid Films 475 (2005) 279-282.
- [10] W. Zhang, A. Tanaka, B.S. Xu, Study on the diamond-like carbon multilayer films for tribological application, Diamond and Related Materials 14 (2005) 1361-1367.
- [11] S. Chowdhury, M.T. Laugier, I. Z. Rahman, Сharacterization of DLC coatings deposited by rf magnetron sputtering, Journal of Materials Processing Technology 153-154 (2004) 804-810.
- [12] Yin-Yu-Chang, Da-Yung Wang, Chi-How Chang, Tribological analysis of nano-composite diamond-like carbon films deposited by unbalanced magnetron sputtering, Surface and Coatings Technology 184 (2004) 349-355.
- [13] A. Czyżniewski, W. Precht, Deposition and some properties of nanocrystalline, nanocomposite and amorphous carbon-based coatings for tribological applications, Journal of Materials Processing Technology 157-158 (2004) 274-283.
- [14] Shu-Ween Jiang, Bin Jiang, Yan Li, Friction and wear study of diamond-like carbon gradient coatings on Ti6Al4V substrate prepared by plasma source ion implant – ion beam enhanced deposition, Applied Surface Science 236 (2004) 285-291.
- [15] Kwang-Reyol Lee, Kwang Youg Eun, Inyoung Kim, Design of W buffer layer for adhesion improvement of DLC films on tool steel, Thin Solid Films 377-378 (2000) 261-268.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BOS5-0018-0093