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Tytuł artykułu
Identyfikatory
Warianty tytułu
Konferencja
AMT'98 XVth Physical Metallurgy and Materials Science Conference 'Advanced materials & technologies' 17-21 May, 1998, Kraków-Krynica, Poland.
Języki publikacji
Abstrakty
Complex structural examinations were performed on thin layers of Ti, TiN and TiO obtained by means of pulsed laser deposition (PLD). Influence of deposition parameters on the film morphology was under examination. The received films revealed an uniform nanostructure. Appearance of a tetragonal Ti-phase was stated in the deposited Ti layers in argon atmosphere. The TiN-phase was formed independently of the nitrogen flow. By increasing concentration of oxygen in the chamber, transition of oxides from Ti2O via TiO to TiO2 was observed. TEM examination of cross-sections of Ti layers revealed a micro-collumnar structure as well as verified the existence of the tetragonal phase. The deposited TiO layer was characterized by a {001} texture.
Wydawca
Czasopismo
Rocznik
Tom
Strony
1057--1060
Opis fizyczny
Twórcy
autor
autor
autor
autor
autor
autor
- Polish Academy of Sciences, Institute of Metallurgy and Materials Science, Kraków
Bibliografia
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BOS1-0007-0039