Evidences of the formation of a conductive Al film on AlN surface under UV excimer laser radiation.

• Autorzy: Yaghdjian L. , Nicolas G. , Vacquier G. , Autric M.
• Konferencja: AMT'98 XVth Physical Metallurgy and Materials Science Conference 'Advanced materials & technologies' 17-21 May, 1998, Kraków-Krynica, Poland.
• Języki publikacji: EN

Abstrakty

EN

Surface modifications of an AlN ceramic under an UV excimer laser irradiation have been investigated by SEM observations and EDS analysis, grazing-XRD and electrical resistance measurements. XRD have revealed the presence of an Al metallic film upon the laser impacted zone and SEM+EDS analysis have showed the formation of halo rich in oxygen around it. Electrical measurements have confirmed the metallic nature of the impacted surface, where a conductive path can be drawn upon the insulator AlN ceramic. Laser conditions have been determined regarding to the obtention of a metallic film by this one-step process.

Słowa kluczowe

EN

conductive film; metallic film; aluminium; hard ceramic; electrical properties; optical properties; excimer laser; electrical resistance

PL

warstewka przewodząca; warstewka metalowa; aluminium; ceramika twarda; własności elektryczne; własności optyczne; laser ekscymerowy; opór elektryczny

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Inżynieria Materiałowa
• Rocznik: 1998
• Tom: R. XIX, nr 4
• Strony: 1051--1056

Twórcy

autor

Yaghdjian L.

autor

Nicolas G.

autor

Vacquier G.

autor

Autric M.

• Laboratoire Laser, Plasma et Procedes Photoniques