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Tytuł artykułu
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Warianty tytułu
Konferencja
XV Physical Metallurgy and Materials Science Conference on Advanced Materials & Technologies AMT'98, Kraków-Krynica, Poland, 17-21 May, 1998
Języki publikacji
Abstrakty
High-resolution transmission electron microscopy (HRTEM) studies of diamond films grown on Si (100) substrates by microwave-assisted chemical vapour deposition show that, under optimized conditions, epitaxially oriented diamond grains may form directly on Si or on thin interlayers of nanocrystalline Beta-SiC. The orientation relationships between the crystal lattices can be described by a near-coincidence site lattice model if small elastic lattice distortions are taken into account. Characteristic of the structure of large-angle grain boundaries are facets parallel to the {111} planes of the diamond lattice. Lattice images of the {110}-diamond lattice planes in <001>-zone axes orientations depict that the structure of small-angle grain boundaries can be described by a dislocation model. Large open volumes and additional second carbon phases are not found at the grain boundaries in diamond films beyond 10 micrometers. Such microscopic investigations of the structure of interfaces in diamond films on silicon are essential for a fundamental understanding of the deposition process and of the correlation of structural with physical interface properties, such as e.g. thermal transport.
Wydawca
Czasopismo
Rocznik
Tom
Strony
785--790
Opis fizyczny
Bibliogr. 13 poz., rys.
Twórcy
autor
- Mikrostrukturanalytik, Technische Fakultät, Universität Kiel, Germany
autor
- Institut für Festkörperforschung, Forschungszentrum Jülich, Germany
autor
- Institut für Festkörperforschung, Forschungszentrum Jülich, Germany
- Universitat Kiel, Technische Fakultat, Mikrostrukturanalytik
Bibliografia
- [1] X. Jiang and C.-P. Klages, Appl. Phys. Lett. 62 (1993) 3438.
- [2] H. Kawarada, T. Suesada, H. Nagasawa, Appl. Phys. Lett. 66 (1995) 583.
- [3] L. Jia, K. Urban, X. Jiang, Phys. Rev. B 52 (1995) 5164.
- [4] D. Wittorf, W. Jäger, K. Urban, T. Gutheit, H. Güttler, G. Schulz, R. Zachai, Diamond Rel. Mater. 6 (1997) 649.
- [5] P. Wurzinger, P. Pongratz, J. Gerber, H. Ehrhardt, Diamond Rel. Mater. 5 (1996) 345
- [6] M. Stammler, R. Stöckel, L. Ley, M. Albrecht, H.P. Strunk, Diamond Rel. Mater. 6 (1997) 747
- [7] F. R. Sivazlian, J. T. Glass and B. R. Stoner, J. Mater. Res. 9 (1994) 2487.
- [8] D. Shechtman, A. Feldman and J. Hutchison, Mater. Lett. 17 (1993) 211.
- [9] D. Wittorf, W. Jäger, C. L. Jia, K. Urban, A. Flöter, H. Güttler, R. Zachai, Inst. Phys. Conf. 157 (1997) 451.
- [10] D. Wittorf, C. L. Jia, W. Jäger, K. Urban, X. Jiang, M. Paul, C.-P. Klages, Mat. Res. Soc. Symp. Proc. 66 (1997) 27.
- [11] H. Verhoeven, A. Flöter, H. Reiß, R. Zachai, D. Wittorf, W. Jäger, Appl. Phys. Lett. 71 (1997) 1329.
- [12] R.W. Balluffi, A. Brokman, A.H. King, Acta Met. 30 (1982) 1453.
- [13] F. Philipp, R. Höschen, M. Osaki, G. Möbus and M. Rühle, Ultramicroscopy 56 (1994)1.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BOS1-0006-0070