Structure of interfaces in heteroepitaxial diamond films.

• Autorzy: Jager W. , Wittorf D. , Urban K.
• Konferencja: XV Physical Metallurgy and Materials Science Conference on Advanced Materials & Technologies AMT'98, Kraków-Krynica, Poland, 17-21 May, 1998
• Języki publikacji: EN

Abstrakty

EN

High-resolution transmission electron microscopy (HRTEM) studies of diamond films grown on Si (100) substrates by microwave-assisted chemical vapour deposition show that, under optimized conditions, epitaxially oriented diamond grains may form directly on Si or on thin interlayers of nanocrystalline Beta-SiC. The orientation relationships between the crystal lattices can be described by a near-coincidence site lattice model if small elastic lattice distortions are taken into account. Characteristic of the structure of large-angle grain boundaries are facets parallel to the {111} planes of the diamond lattice. Lattice images of the {110}-diamond lattice planes in <001>-zone axes orientations depict that the structure of small-angle grain boundaries can be described by a dislocation model. Large open volumes and additional second carbon phases are not found at the grain boundaries in diamond films beyond 10 micrometers. Such microscopic investigations of the structure of interfaces in diamond films on silicon are essential for a fundamental understanding of the deposition process and of the correlation of structural with physical interface properties, such as e.g. thermal transport.

Słowa kluczowe

EN

diamond film; interface; crystal lattice; chemical vapor deposition; silicon; grain boundary; heteroepitaxy

PL

warstwa diamentowa; granica faz; sieć krystaliczna; chemiczne osadzanie z pary; krzem; granica ziarna; heteroepitaksja

• Wydawca: Wydawnictwo SIGMA-NOT
• Czasopismo: Inżynieria Materiałowa
• Rocznik: 1998
• Tom: R. XIX, nr 4
• Strony: 785--790
• Opis fizyczny: Bibliogr. 13 poz., rys.

Twórcy

autor

Jager W.

• Mikrostrukturanalytik, Technische Fakultät, Universität Kiel, Germany

autor

Wittorf D.

• Institut für Festkörperforschung, Forschungszentrum Jülich, Germany

autor

Urban K.

• Institut für Festkörperforschung, Forschungszentrum Jülich, Germany

• Universitat Kiel, Technische Fakultat, Mikrostrukturanalytik

Bibliografia

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