Si-Based Electrodes for Potentiometric Measurements of Aqueous Solutions

• Autorzy: Zaborowski M. , Tomaszewski D. , Jaroszewicz B. , Grabiec P.
• Języki publikacji: EN

Abstrakty

EN

Three sensors for chemical and physical examination of aqueous solutions were presented in the paper. An Au potentiometric electrode, an AgCl chlorine ion sensor and a p-n junction thermometer were developed. Their layout and internal structure were explained in the light of the manufacturing process. The device characteristics were measured in conditions corresponding to normal operation of the devices. Basic electrical parameters of the developed structures, as well as their sensitivity to environmental parameter variation were estimated.

Słowa kluczowe

EN

chlorine ion sensor; potentiometric sensor; p-n junction thermometer

• Wydawca: Instytut Łączności - Państwowy Instytut Badawczy
• Czasopismo: Journal of Telecommunications and Information Technology
• Rocznik: 2009
• Tom: nr 4
• Strony: 71--75
• Opis fizyczny: Bibliogr. 1 poz., rys.

Twórcy

autor

Zaborowski M.

autor

Tomaszewski D.

autor

Jaroszewicz B.

autor

Grabiec P.

• Institute of Electron Technology, Lotników av. 32/46, 02-668 Warsaw, Poland,

Bibliografia

• [1] M. Zaborowski, B. Jaroszewicz, D. Tomaszewski, P. Prokaryn, E. Malinowska, E. Grygołowicz-Pawlak, and P. Grabiec, “Fabrication of MOS – compatible ion – sensitive devices for water pollution monitoring (WARMER)”, in Proc. 14th Int. Conf. Mix. Des. Integr. Circ. Syst. 2007, Ciechocinek, Poland, 2007, pp. 477–481.