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A set of physical models describing silicon carbide with fitting parameters is proposed. The theoretical I-V output and transfer characteristics and parameters of MOS transistors were calculated using Silvaco Atlas and Crosslight Apsys semiconductor device simulation environments.
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Tom
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93--95
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Bibliogr.11 poz., il., tab.
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autor
autor
autor
- Universite du Qebec en Outaouais, C. P. 1250, succ. Hull, 283, boul. Alexandre-Tache, Gatineau (Quebec) J8X 3X7, Canada, Michael.Korwin-Pawlowski@uqo.ca
Bibliografia
- [1] Properties of Advanced Semiconductor Materials GaN, AlN, InN, BN, SiC, SiGe, M. E. Levinshtein, S. L. Rumyantsev, and M. S. Shur, Eds. New York: Wiley, 2001, pp. 31–47.
- [2] M. Ruff, H. Mitlehner, and R. Helbig, “SiC devices: physics and numerical simulation”, IEEE Trans. Electron Dev., vol. 41, pp. 1040–1053, 1994.
- [3] V. V. Afanasev, M. Bassler, G. Pensl, and M. Schultz, “Intrinsic SiC/SiO2”, Phys. Stat. Sol. A, vol. 162, no. 1, pp. 321–337, 1997.
- [4] User’s Manual. Atlas, Silvaco, 2002.
- [5] User’s Manual. Apsys, Crosslight, 2000.
- [6] I. A. Khan and J. A. Cooper, Jr., “Measurement of high-field electron transport in silicon carbide”, IEEE Trans. Electron Dev., vol. 47, pp. 269–273, 2000.
- [7] A. A. Lebedev, “Deep level centers in silicon carbide: a review”, Semiconductors, vol. 33, no. 2, pp. 107–130, 1999.
- [8] R. Raghunathan and B. J. Baliga, “Measurement of electron and hole impact ionization coefficients for SiC power semiconductor devices and IC”, in ISPSD’97 IEEE Int. Symp. Pow. Semicond. Dev. IC’s, Weimar, Germany, 1997, pp. 173–176.
- [9] A. Galeckas, J. Linnros, V. Grivickas, U. Lindefelt, and C. Hallin, “Auger recombination in 4H-SiC: unusual temperature behavior”, in Proc. 7th Int. Conf. SiC, III-Nitr. Rel. Mater., Stockholm, Sweden, 1997, pp. 533–536.
- [10] J. P. Bergman, “Carrier lifetimes in SiC, studied by time resolved photoluminescence spectroscopy”, Diam. Rel. Mater., vol. 6, pp. 1324–1328, 1997.
- [11] U. Lindefelt, “Doping-induced band edge displacements and band gap narrowing in 3C-, 4H-, 6H-SiC, and Si”, J. Appl. Phys., vol. 84, no. 5, pp. 2628–2637, 1998.
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Bibliografia
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bwmeta1.element.baztech-article-BAT8-0009-0074