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Monte Carlo simulations for HET ceramics sputtering yield prediction

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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
The Monte Carlo simulation code for ion sputtering CSiPI was developed for electric propulsion-induced erosion applications. In this paper we present how ceramics erosion can be treated. Indeed, these materials strongly differ from metals for which MC simulations are validated. We show that the target has to be resolved in time and space in order to deal with the target stoechiometry evolutions under ion bombardment. This is treated by the CSiPI2007 version of CSiPI. Then we propose a description for the characteristic binding energies that are opposed to some classical description. Indeed, we consider for ceramics a negligible surface binding energy compared to the bulk binding energy. This description is argued and a methodology is proposed for energies determination from the material atomization energy. This allows to perform the predictive sputtering yield Calculations. The code CSiPI and the proposed protocol for input data determination is validated by comparing simulations with experiments for BN, SiO2 and MgO. A good correlation is observed for normal ion bombardment by Xe+ ions in the 350-1000 eV range. For grazing incidence, experimental measurements depend strongly on the target roughness, then results are not directly comparable. At last, we present an estimation of erosion yields of the composite ceramics BN-SiO2 used in HETs.
Rocznik
Strony
363--373
Opis fizyczny
Bibliogr. 15 poz., wykr.
Twórcy
autor
Bibliografia
  • 1. D. YU, Y. LI S. SONG, Ion Sputtering Erosion of Channel Wall Corners in Hall Thrusters, Journal of Physics D: Applied Physics, 39, 2205-2211, 2006.
  • 2. J.T. YIM, M. KEYDAR, I.D. BOYD, An Investigation of Factors Involved in Hall Thruster Wall Erosion Modelling, AIAA 2006-4657, 42nd AIAA/ASME/SAE/ASEE Joint Propulsion Conference &: Exhibit.
  • 3. Y. GARNIER, V. VIEL, J.-F. ROUSSEL, J. BERNARD, Low-Energy Xenon Ion Sputtering of Ceramics Investigated for Stationary Plasma Thrusters, Journal of Vacuum Science and Technology A, 17, 6, 3246-3254, 1999.
  • 4. M. BRITTON, D. WATERS, R. MESSES, E. SECHKAR, B. BANKS, Sputtering Erosion Measurment on Boron Nitride as a Hall Thruster Material, Tech. Rep., NASA, 2002, NASA TM-2002-211837.
  • 5. A.P. YALIN, V. SURLA, C. FARNELL, M. BUTWEILLER, J.D. WILLIAMS, Sputtering Studies of Multicomponent Materials by Weight Loss and Cavity Ring-Down Spectroscopy, 42nd AIAA Joint Propulsion Conference (Sacramento CA), 2006.
  • 6. A.P. YALIN, B. RUBIN, S.R. DOMINGUE, Z. GLUECKERT, J.D. WILLIAMS, Differential Sputter Yields of Boron Nitride, Quartz, and Kapton Due to Low Energy Xe+ Bombardment, AIAA 2007-5314, 43rd JPC 2007, Cincinnati, OH.
  • 7. J.T. YIM, M. FALK, M. KEIDAR, I.D. BOYD, Calculation of Boron Nitride Sputter Yield Under Low Energy Xenon Ion Bombardment, AIAA 2007-5313, 43rd IAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit, 2007.
  • 8. M. CHEN, G. ROHRBACH, A. NEUPFER, K.-L. BARTH, A. LUNK, Simulation of Boron Nitride Sputtering Process and its Comparision with Experimental Data, IEEEE Transactions on Plasma Science, 26, 6, 1998.
  • 9. D.H. KIM, G.H. LEE, S.Y. LEE, D.H. KIM, Atomic Scale Simulation of physical sputtering of silicon oxide and silicon nitride thin films, Journal of Crystal Growth, 286, 71-77, 2006.
  • 10. J.F. ZIEGLER, J.P. BIERSACK, U. LITTMARK, The Stopping and Range of Ions in Solids, Pergamon Press, 1985.
  • 11. W. ECKSTEIN, Computer Simulation of Ion-Solid Interactions, Springer Series in Materials Science, 10, 1991.
  • 12. V.S. CHERNYSH, W. ECKSTEIN, A.A. HAIDAROV, V.S. KULIKAUSKAS, E.S. MASHKOVA, V.A. MOLCHANOV, Angular distribution of particles sputtered from polycrystalline platinum by low energy ions, Nuclear Instrument and Methods in Physics Research B, 164-165, 755-761, 2000.
  • 13. TH. TONDU, V. INGUIMBERT, F. DARNON, ONERA/DESP Experimental and Simulation Tools for Ion-Matter Interaction characterization at oblique incidence, 10th ISMSE fc the 8th ICPMSE, Collioure, France, 19-23 June 2006 (SP-616, September 2006).
  • 14. TH. TONDU, PhD of Supaero, Toulouse, France, Etude de la pulvérisation ionique; application aux effets de jet de la propulsion plasmique, 2005.
  • 15. Handbook of Chemistry and Physics, 62nd Edition, 1981-1982, CRC Press.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BAT5-0036-0051
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