Thin dielectric electrodiffusion masks for Ag+ - Na+ ion exchange applications

• Autorzy: Mrozek E. , Mrozek P.
• Języki publikacji: EN

Abstrakty

EN

A new method of thin dielectric mask preparation for Ag+ - Na+ ion exchange applications was developed. Electrodiffusion bonding of Al-film to glass was used to obtain very thin dielectric Al2O3 layer in the Al-glass transition zone. After Al removal, the quality of the dielectric mask was tested in Ag pure thermal diffusion and electrodiffusion processes in molten AgNO3.

Słowa kluczowe

EN

optical glass; optical film; optical fabrication; alumina; dielectric thin film; electromigration; ion exchange; silver compound; sodium compound; thermal diffusion

PL

szkło optyczne; warstwa optyczna; wyrób optyczny; tlenek glinu; cienka warstwa dielektryczna; elektrodyfuzja; wymiana jonowa; związek srebra; związek sodu; termodyfuzja

• Wydawca: Instytut Podstawowych Problemów Techniki PAN
• Czasopismo: Journal of Technical Physics
• Rocznik: 2003
• Tom: Vol. 44, no 3
• Strony: 289--294
• Opis fizyczny: Bibliogr. 4 poz., rys.

Twórcy

autor

Mrozek E.

• Department of Physics, Technical University of Bialystok, Wiejska 45 A, 15-351 Bialystok

autor

Mrozek P.

• Department of Physics, Technical University of Bialystok, Wiejska 45 A, 15-351 Bialystok

Bibliografia

• 1. C.R. LAVERS, K. ITOH, S.C. WU, M. MURABAYASHI, I. MAUCHLINE, G. STEWART, T. STOUT, Planar optical waveguides for sensing applications, Sensors and Actuators, B 69, 85-95, 2000.
• 2. B. PANTCHEV, P. DANESH, Masking problem in the fabrication of optical waveguide structures in glass by double ion exchange, Jpn. J. Appl. Phys., 36, 4320-4322, 1997.
• 3. R.G. WALKER, C.D.W. WILKINSON, J.A.H. WILKINSON, Integrated optical waveguiding structures made by silver ion-exchange in glass. 1: The propagation characteristics of stripe ion- exchanged waveguides; a theoretical and experimental investigation, Applied Optics, 22, 12, 19231928, 1983.
• 4. P. MROZEK, T. ŁUKASZEWICZ, Electrodiffusion bonding of aluminum to glass, Proceedings of SPIE. 3725, 85-88, 1999.