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Formulation of stiffness constant and effective mass for a folded beam

Wybrane pełne teksty z tego czasopisma
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Warianty tytułu
Języki publikacji
EN
Abstrakty
EN
Stiffness constant and effective mass are two important parameters in the performance analysis of an accelerometer. Their values depend mostly on the structural design of the comb finger-type accelerometer, especially its suspension beam design. In this study, the formulation of the stiffness constant and effective mass is derived successfully from theoretical analysis. The performance of the accelerometer can be analyzed using common designs of its suspension beam. The results obtained are comparable with other published results and those obtained from the finite element (FE) analysis.
Słowa kluczowe
Rocznik
Strony
405--418
Opis fizyczny
Bibliogr. 21 poz.
Twórcy
autor
autor
autor
  • School of Mechanical Engineering Engineering Campus Universiti Sains Malaysia 14300 Nibong Tebal Seberang Perai Selatan, Pulau Pinang, Malaysia
Bibliografia
  • 1. B.V. Amini, F. Ayazi, A 2.5V 14-bit CMOS-SOI capacitive accelerometer, Journal of Solid-State Circuits, 39, 12, 2467–2476, 2004.
  • 2. P.P. Benham, R.J. Drawford, C.G. Armstrong, Mechanics of Engineering Materials, Prentice Hall, Ltd., UK 1996.
  • 3. B. Borovic, A.Q. Liu, D. Popa, H. Cai, F.L. Lewis, Open-loop versus closed-loop control of MEMS devices: choices and issues, Journal of Micromechanics and Microengineering, 15, 1917–1924, 2005.
  • 4. J.S. Chae, H. Kulah, A. Salian, K. Najafi, A High Sensitivity Silicon on Glass Lateral μg Microaccelerometer, Third Annual Micro/NanoTechnology Conference, Houston, Texas 2000.
  • 5. J.S. Chae, H. Kulah, K. Najafi, A hybrid silicon on glass lateral microaccelerometer with CMOS readout circuitry, Technical Digest, IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas 2002.
  • 6. M.L. James, G.M. Smith, J.C. Wolford, P.W. Whaley, Vibration of Mechanical and Structural Systems, Happer and Row Publishers, New York 1989.
  • 7. S.B. Lee, G.J. Nam, J.S. Chae, H.S. Kim, A.J. Drake, Two-Dimensional Position Detection System with MEMS Accelerometer for MOUSE Applications, Proceedings of the 38th Design Automation Conference, Las Vegas, USA 2001.
  • 8. R. Legtenberg, A.W. Groeneveld, M. Elwenspoek, Comb-drive actuators for large displacements, Journal of Micromechanics and Microengineering, 6, 320–329, 1996.
  • 9. R. Liu, B. Paden, K. Turner, MEMS resonators that are robust to process-induced feature width variations, Journal of Microelectromechanical Systems, 11, 5, 505–511, 2002.
  • 10. O. Lüdtke, V. Biefeld, A. Buhrdorf, J. Binder, Laterally driven accelerometer fabricated in single crystalline silicon, Sensors and Actuators A., 82, 149–154, 2000.
  • 11. H. Luo, G. Zhang, L.R. Carley, G.K. Fedder, A post-CMOS micromachined Lateran accelerometer, Journal of Microelectromechanical Systems, 11, 3, 188–195, 2002.
  • 12. F.E.H. Tay, R. Kumaran, B.L. Chua, V.J. Logeeswaran, Electrostatic Spring Effect on the Dynamic Performance of Microresonators, Technical Proceedings of the International Conference on Modeling and Simulation of Microsystems, San Diego, California, USA 2000.
  • 13. M.M. Tilleman, Analysis of electrostatic comb-driven actuators in linear and nonlinear regions, International Journal of Solid and Structures, 41, 4889–4898, 2004.
  • 14. S.P. Timoshenko, J.N. Goodier, Theory of Elasticity, 3rd ed., McGraw-Hill Inc, New York, USA 1970.
  • 15. H. Urey, C. Kan, W.O. Davis, Vibration mode frequency formulae for micromechanical scanners, Journal of Micromechanics and Microengineering, 15, 1713–1721, 2005.
  • 16. J.W. Wittwer, L.L. Howell, Mitigating the effect of local flexibility at the built-in ends of cantilever beams, Journal of Applied Mechanics, 71, 748–751, 2004.
  • 17. H.K. Xie, G.K. Fedder, Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS, Sensors and Actuators A, 95, 212–221, 2002.
  • 18. W. Xue, J.Wang, T.H. Cui, Modeling and design of polymer-based tunneling accelerometers by ANSYS/MATLAB, IEEE, ASME Transactions on Mechatronics, 10, 4, 468–472, 2005.
  • 19. N. Yazdi, F. Ayazi, K. Najafi, Micromachined Inertial Sensors, Invited Paper, Special Issue of IEEE Proceedings, 86, 8, 1640–1659, 1998.
  • 20. G.Y. Zhou, P. Dowd, Tilted folded beam suspension for extending the stable travel range of comb-drive actuators, Journal of Micromechanics and Microengineering, 13, 178–183, 2003.
  • 21. N.N. Zhou, A. Agogino, K.S.J. Pister, Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS), Proceedings of DETC 2002 on Design Automation, Montreal, Canada 2002.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BAT4-0010-0004
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