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Abstrakty
A measurement system for integrated circuit testing has been developed. It consists of a semi-automatic probe station and a set of measurement equipment controlled by commercially available measurement software. The probe station is controlled by dedicated software. Both the measurement and station-control software communicate using the DDE protocol. The measurement system is flexible. It is particularly suitable for semi-automatic testing of multi-project wafers. Output data generated by the system is used for the characterization of the CMOS technologies.
Słowa kluczowe
Rocznik
Tom
Strony
124--128
Opis fizyczny
Bibliogr. 6 poz., il.
Twórcy
autor
- Industrial Institute of Electronics, Długa st 44/50, 00-241 Warsaw, Poland
autor
- Industrial Institute of Electronics, Długa st 44/50, 00-241 Warsaw, Poland
autor
- Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland
autor
- Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland
Bibliografia
- [1] H. Rodent, "Supportingin the clipboard, ODE and OLE in applications", MSDN Library Visual Studio 6.0, 1992.
- [2] H. Rodent, "Quick and easy DDE server", MSDN Library Visual Studio 6.0, 1992.
- [3] "METRICS documentation", http://www.metricstech.com
- [4] J. Marczewski et al., "Monolithic silicon pixel detectors in SOI technology", in Linear Coll. Worksh., Prague, Czech Republic, 2002, http://www-hep2.fzu.cz/ecfadesy/Talks/Vertex Detector/Marczewski Jacek Prague ECFA DESY.pps
- [5] M. Barański et al., "TSSOI as an effcient tool for diagnostics of SOI technology in the IET", in 6th Symp. Diagn.&Yield, Warsaw, Poland, 2003.
- [6] D. Tomaszewski et al., "A versatile tool for MOSFETs parameters extraction", in 6th Symp. Diagn.&Yield, Warsaw, Poland, 2003.
Typ dokumentu
Bibliografia
Identyfikator YADDA
bwmeta1.element.baztech-article-BAT3-0022-0020