Diagnostics of micro- and nanostructure using the scanning probe microscopy

• Autorzy: Gotszalk T. , Janusz P. , Marendziak A. , Czarnecki P. , Radojewski J. , Szeloch R. F. , Grabiec P. , Rangelow I. W.
• Języki publikacji: EN

Abstrakty

EN

In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.

Słowa kluczowe

EN

scannig probe microscopy; microsystem; nanofabrication

• Wydawca: Instytut Łączności - Państwowy Instytut Badawczy
• Czasopismo: Journal of Telecommunications and Information Technology
• Rocznik: 2005
• Tom: nr 1
• Strony: 41--46
• Opis fizyczny: Bibliogr. 6 poz., fot.

Twórcy

autor

Gotszalk T.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology Janiszewskiego st 11/17, 50-372 Wrocław, Poland

autor

Janusz P.

• Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland

autor

Marendziak A.

• Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland

autor

Czarnecki P.

• Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland

autor

Radojewski J.

• Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland

autor

Szeloch R. F.

• Faculty of Microsystem Electronics and Photonics Wrocław University of Technology Janiszewskiego st 11/17 50-372 Wrocław, Poland

autor

Grabiec P.

• Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland

autor

Rangelow I. W.

• Institute of Technical Physics University of Kassel Heinrich-Plett Str. 32 34-109 Kassel, Germany

Bibliografia

• [1] G. Binnig, H. Rohrer, and E. Weibel, "Surface studies by scanning tunneling microscopy", Phys. Rev. Lett., vol. 49, p. 726, 1982.
• [2] G. Binnig, C. F. Quate, and Ch. Gerber, "Atomic force microscopy", Phys. Rev. Lett., vol. 56, p. 930, 1986.
• [3] T. Gotszalk, P. Grabiec, and I. W. Rangelow, "Piezoresistive sensors for scanning probe microscopy", Ultramicroscopy, vol. 82, p. 39, 2000.
• [4] T. Gotszalk, F. Shi, P. Grabiec, P. Dumania, P. Hudek, and I. W. Rangelow, "Fabrication of the multipurpose piezoresistive Wheatstone bridge cantilever with conductive microtip for electrostatic force and scanning capacitance microscopy", J. Vac. Sci. Technol., vol. B16, no. 6, p. 3948, 1998.
• [5] R. F. Szeloch, T. Gotszalk, and P. Janus, "Scanning thermal microscopy in microsystem reliability analysis", Microelectron. Reliab., vol. 42, p. 1719, 2002.
• [6] T. Gotszalk, P. Czarnecki, P. Grabiec, K. Doma«ski, M. Zaborowski, and I. W. Rangelow, "Microfabricated cantilever with metallic tip for electrostatic and capacitance microscopy and its application to investigation of semiconductor devices", J. Vac. Sci. Technol., vol. B1622, p. 506, 2004.