Integrated gas chromatograph

• Autorzy: Dziuban J. A. , Mróz J. , Koszur J.
• Języki publikacji: EN

Abstrakty

EN

A portable gas chromatograph with integrated micromachined flushed injector and thermal mass detector (TCD) has been developed. The silicon/glass injector operates in a fixed volume (2×7 žL) or electronically operated mode. An integrated, pneumatically operated, fast cross-valve is applied in the injector. The TCD detector consists of two Pt microheaters and thermoresistors packaged in a silicon/glass micromachined chip. The temperature of two capillary molecular sieve separation columns is controlled by a thick-film heater fabricated on polyimide foil. The chromatograph is equipped with two 16-bits microprocessors communicating with the external portable PC. The instrument may operate in the on-line continuous analysis mode.

Słowa kluczowe

EN

portable gas chromatograph; integrated injectors; silicon micromechanics

• Wydawca: Instytut Łączności - Państwowy Instytut Badawczy
• Czasopismo: Journal of Telecommunications and Information Technology
• Rocznik: 2005
• Tom: nr 1
• Strony: 20--23
• Opis fizyczny: Bibliogr.3 poz., rys.

Twórcy

autor

Dziuban J. A.

• Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology Janiszewskiego st 11/17, 50-372 Wrocław, Poland

autor

Mróz J.

• The Research and Development Center for Electrical Engineering and Automation in Mining (EMAG) Leopolda st 31 40-189 Katowice, Poland

autor

Koszur J.

• Institute of Electron Technology Lotników av. 32/46 02-668 Warsaw, Poland

Bibliografia

• [1] S. Terry, J. Jerman, and J. Angell, "A gas chromatographic air analyzer fabricated on silicon wafer", IEEE Trans. Electron. Dev., vol. ED26, no. 2, pp. 1880-1886, 1979.
• [2] M. B. Stone and J. A. de Mello, "Life, the universe and microfluidics", Lab Chip, no. 2, pp. 58-64, 2002.
• [3] Actaris Inc., "The meter of natural gas" (nonpublished technical letter).